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Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching 会议论文
Proceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS, Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
Authors:  Zhang Jingwen;  Fan Bin;  Li Zhiwei;  Liu Xin;  Li Bincheng;  Han Yu;  Gong Chang
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reactive ion etching  Fluent(Ansys)  numerical simulation  pressure distribution