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Design and simulation of large field plate lithography lens 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850V
Authors:  Deng, Chao;  Xing, Tingwen;  Lin, Wumei;  Zhu, Xianchang
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Fits And Tolerances  Lithography  Manufacture  Materials Testing  Optical Design  Optical Devices  Optical Systems  
Wafer focusing measurement of optical lithography system based on Hartmann-Shack wavefront testing 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 66, 页码: 128-131
Authors:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin;  Zhu, XC (reprint author), Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan, Peoples R China.
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Focal length measurement of a microlens-array by grating shearing interferometry 期刊论文
APPLIED OPTICS, 2014, 卷号: 53, 期号: 29, 页码: 6663-6669
Authors:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin
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Design of a projection objective with high numeric aperture and large view field 会议论文
, 2014
Authors:  Liu, Junbo;  Hu, Song;  Gao, Hongtao;  Zhao, Lixin;  Zhu, Xianchang;  Liu, JB (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
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Focal length measurement of a microlens-array by grating shearing interferometry 期刊论文
Applied Optics, 2014, 卷号: 53, 期号: 29, 页码: 6663-6669
Authors:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin
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基于Hartmann-Shack波前检测原理的微透镜阵列焦距测量 期刊论文
光学精密工程, 2013, 卷号: 21, 期号: 5, 页码: 1122-1128
Authors:  朱咸昌;  伍凡;  曹学东;  吴时彬
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微透镜阵列  焦距测量  波前检测  哈特曼波前传感器  图像清晰度  
Focal length measurement of Microlens-array by the clarity function of digital image 会议论文
, 2012
Authors:  Zhu, Xianchang;  Wu, Zhu Fan;  Cao, Xuedong;  Wu, Shibin;  Zhang, Peng;  Jing, Hongwei;  Zhu, X.
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光栅衍射法测量微透镜列阵焦距时产生的光斑干扰分析 期刊论文
光学学报, 2011, 卷号: 31, 期号: 11, 页码: 112010-1-
Authors:  朱咸昌;  伍 凡;  曹学东;  吴时彬;  张鹏
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基于光栅多缝衍射的转角法测量微透镜焦距 期刊论文
光学学报, 2011, 卷号: 31, 期号: 5, 页码: 213-217
Authors:  朱咸昌;  曹学东;  吴时彬;  张鹏
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