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Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
Authors:  Zhou, Shaolin;  Liu, Junbo;  Deng, Qian;  Xie, Changqing;  Chan, Mansun
Favorite  |  View/Download:90/0  |  Submit date:2016/10/27
Diffraction  Photolithography  Terahertz Filters  Hexagonal Array  
The Anomaly of Periodicity Doubling in Projection Photolithography of Periodic Features 期刊论文
IEEE Photonics Technology Letters, 2016, 卷号: 28, 期号: 22, 页码: 2529-2532
Authors:  Liu, Junbo;  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  He, Yu;  Chen, Yinghong
Adobe PDF(955Kb)  |  Favorite  |  View/Download:66/0  |  Submit date:2018/06/14
Diffraction  Frequency Doublers  Light Polarization  Phase Shift  
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin;  Hu, Song;  Chen, Yinghong
Adobe PDF(527Kb)  |  Favorite  |  View/Download:70/0  |  Submit date:2018/06/14
Crystal Symmetry  Frequency Doublers  Lithography  Manufacture  Microoptics  Optical Devices  Phase Shift  Ultraviolet Spectroscopy  
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu;  Cheng, Yiguang
Favorite  |  View/Download:102/0  |  Submit date:2015/12/04
Diffraction  Depth-of-focus  Talbot Lithography  Microfabrication  
Moire fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
Favorite  |  View/Download:88/0  |  Submit date:2015/12/04
Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
Authors:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
Favorite  |  View/Download:75/0  |  Submit date:2015/12/04
Diffraction And Gratings  Micro/nanofabrication  Phase Modulation  
Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process 期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 4, 页码: 4900111
Authors:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin;  Zhou, Shaolin (shaolinzhou@gmail.com)
Adobe PDF(920Kb)  |  Favorite  |  View/Download:62/0  |  Submit date:2016/11/23
Moiré fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
Adobe PDF(1995Kb)  |  Favorite  |  View/Download:47/0  |  Submit date:2016/11/23
Spectrum-Integral Talbot Effect for UV Photolithography with Extended DOF 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu;  Cheng, Yiguang
Adobe PDF(1408Kb)  |  Favorite  |  View/Download:65/0  |  Submit date:2016/11/23
Moire interferometry with high alignment resolution in proximity lithographic process 期刊论文
APPLIED OPTICS, 2014, 卷号: 53, 期号: 5, 页码: 951-959
Authors:  Zhou, Shaolin;  Hu, Song;  Fu, Yongqi;  Xu, Xiangmin;  Yang, Jun
Favorite  |  View/Download:105/0  |  Submit date:2015/07/10