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Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 8, 页码: 2301-2306
Authors:  Zhou, Yi;  Tang, Yan;  Zhu, Jiangping;  Deng, Qinyuan;  Yang, Yong;  Zhao, Lixin;  Hu, Song
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Microstructure  
Contrast enhancement of microsphere-assisted super-resolution imaging in dark-field microscopy 期刊论文
APPLIED PHYSICS EXPRESS, 2017, 卷号: 10, 期号: 8
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
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SOLID IMMERSION LENS  RESOLUTION  NANOSCOPE  SINGLE  
Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry 会议论文
0277-786X
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
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Microstructure - Modulation - Surface topography - Units of measurement  
白光干涉检测仪垂直扫描系统设计 期刊论文
半导体技术, 2017, 卷号: 42, 期号: 3, 页码: 229-234
Authors:  姚靖威;  唐燕;  周毅;  邓茜;  赵立新;  胡松
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Quadratic grating apodized photon sieves for simultaneous multiplane microscopy 期刊论文
Optics and Lasers in Engineering, 2017, 卷号: 97, 页码: 1339-1351
Authors:  Cheng, Yiguang;  Zhu, Jiangping;  He, Yu;  Tang, Yan;  Hu, Song;  Zhao, Lixin
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Diffractive optics - Light - Optical transfer function - Photons - X ray microscopes  
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian;  Zhao, Lixin
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Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement  
Focusing Properties of Single-Focus Photon Sieve 期刊论文
IEEE Photonics Technology Letters, 2017, 卷号: 29, 期号: 3, 页码: 275-278
Authors:  Cheng, Yiguang;  Zhu, Jiangping;  Hu, Song;  Zhao, Lixin;  Yan, Wei;  He, Yu;  Jiang, Weibo;  Liu, Junbo
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Diffractive optics - Focusing - Photons - Sieves  
High precision locating control system based on VCM for Talbot lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
Authors:  Yao, Jingwei;  Zhao, Lixin;  Deng, Qian;  Hu, Song
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Control Systems  Digital Signal Processors  Efficiency  Feedback  Lithography  Manufacture  Materials Testing  Optical Devices  Signal Processing  Structural Design  Three Term Control Systems  
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin;  Hu, Song;  Chen, Yinghong
Adobe PDF(527Kb)  |  Favorite  |  View/Download:52/0  |  Submit date:2018/06/14
Crystal Symmetry  Frequency Doublers  Lithography  Manufacture  Microoptics  Optical Devices  Phase Shift  Ultraviolet Spectroscopy  
Wafer focusing measurement of optical lithography system based on Hartmann-Shack wavefront testing 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 66, 页码: 128-131
Authors:  Zhu, Xianchang;  Hu, Song;  Zhao, Lixin;  Zhu, XC (reprint author), Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan, Peoples R China.
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