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Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
Favorite  |  View/Download:97/0  |  Submit date:2015/07/10
Proximity Lithography  Mask-wafer Alignment  Phase Analysis  Spatial Frequency  
Gap-optimized Moiré phase imaging alignment for proximity lithography 期刊论文
Optical Engineering, 2015, 卷号: 54, 期号: 1, 页码: 17105
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
Adobe PDF(2045Kb)  |  Favorite  |  View/Download:59/0  |  Submit date:2016/11/23
Adjustment strategy for inclination moiré fringes in lithography by spatial frequency decomposition 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
Adobe PDF(718Kb)  |  Favorite  |  View/Download:46/0  |  Submit date:2016/11/23
Gap-optimized Moire phase imaging alignment for proximity lithography 期刊论文
OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
Favorite  |  View/Download:112/0  |  Submit date:2015/07/10
Lithography  Alignment  Moire Techniques