IOE OpenIR

Browse/Search Results:  1-3 of 3 Help

Selected(0)Clear Items/Page:    Sort:
The impact of polarization on grating performance of the lateral shearing interferometer 会议论文
, 2014
Authors:  Yao, Zhengpeng;  Liu, Xuefeng;  Xing, Tingwen
Adobe PDF(946Kb)  |  Favorite  |  View/Download:61/0  |  Submit date:2016/11/23
The impact of polarization on metrology performance of the lateral shearing interferometer 会议论文
, 2013
Authors:  Zhengpeng, Yao;  Tingwen, Xing
Adobe PDF(446Kb)  |  Favorite  |  View/Download:36/0  |  Submit date:2016/11/23
Vector analysis of two-dimensional Ronchi grating in the metrology system 会议论文
, 2013
Authors:  Yao, Zhengpeng;  Xing, Tingwen
Adobe PDF(457Kb)  |  Favorite  |  View/Download:28/0  |  Submit date:2016/11/23