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Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
Authors:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
Favorite  |  View/Download:75/0  |  Submit date:2015/12/04
Diffraction And Gratings  Micro/nanofabrication  Phase Modulation  
Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process 期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 4, 页码: 4900111
Authors:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin;  Zhou, Shaolin (shaolinzhou@gmail.com)
Adobe PDF(920Kb)  |  Favorite  |  View/Download:62/0  |  Submit date:2016/11/23
Moire interferometry with high alignment resolution in proximity lithographic process 期刊论文
APPLIED OPTICS, 2014, 卷号: 53, 期号: 5, 页码: 951-959
Authors:  Zhou, Shaolin;  Hu, Song;  Fu, Yongqi;  Xu, Xiangmin;  Yang, Jun
Favorite  |  View/Download:104/0  |  Submit date:2015/07/10
Moiré interferometry with high alignment resolution in proximity lithographic process 期刊论文
Applied Optics, 2014, 卷号: 53, 期号: 5, 页码: 951-959
Authors:  Zhou, Shaolin;  Hu, Song;  Fu, Yongqi;  Xu, Xiangmin;  Yang, Jun
Adobe PDF(984Kb)  |  Favorite  |  View/Download:43/0  |  Submit date:2016/11/23
Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 卷号: 25, 期号: 18, 页码: 1847-1850
Authors:  Zhou, Shaolin;  Xie, Changqing;  Yang, Yong;  Hu, Song;  Xu, Xiangmin;  Yang, Jun
Favorite  |  View/Download:96/0  |  Submit date:2015/04/17
Optical Sensing  Coherent Imaging  Diffraction Optical Alignment  Lithography  
Moiré-based phase imaging for sensing and adjustment of in-plane twist angle 期刊论文
IEEE Photonics Technology Letters, 2013, 卷号: 25, 期号: 18, 页码: 1847-1850
Authors:  Zhou, Shaolin;  Xie, Changqing;  Yang, Yong;  Hu, Song;  Xu, Xiangmin;  Yang, Jun
Adobe PDF(1286Kb)  |  Favorite  |  View/Download:42/0  |  Submit date:2016/11/23