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Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy 期刊论文
OPTICS EXPRESS, 2018, 卷号: 26, 期号: 3, 页码: 2944-2953
Authors:  Xie, Zhongye;  Tang, Yan;  Zhou, Yi;  Deng, Qinyuan
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Digital devices  Film thickness  Interferometry  Modulation  Thickness measurement  
Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy 会议论文
Proceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS, Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
Authors:  Xie, Zhongye;  Tang, Yan;  Liu, Xi;  Yang, Kejun;  Hu, Song
Adobe PDF(1425Kb)  |  Favorite  |  View/Download:7/0  |  Submit date:2019/08/23
thin films  Fourier transform  microscopy  surface topography  digital micro-mirror devices  modulation