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Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
Authors:  Zhou, Shaolin;  Liu, Junbo;  Deng, Qian;  Xie, Changqing;  Chan, Mansun
Favorite  |  View/Download:92/0  |  Submit date:2016/10/27
Diffraction  Photolithography  Terahertz Filters  Hexagonal Array  
Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 卷号: 25, 期号: 18, 页码: 1847-1850
Authors:  Zhou, Shaolin;  Xie, Changqing;  Yang, Yong;  Hu, Song;  Xu, Xiangmin;  Yang, Jun
Favorite  |  View/Download:97/0  |  Submit date:2015/04/17
Optical Sensing  Coherent Imaging  Diffraction Optical Alignment  Lithography  
Moiré-based phase imaging for sensing and adjustment of in-plane twist angle 期刊论文
IEEE Photonics Technology Letters, 2013, 卷号: 25, 期号: 18, 页码: 1847-1850
Authors:  Zhou, Shaolin;  Xie, Changqing;  Yang, Yong;  Hu, Song;  Xu, Xiangmin;  Yang, Jun
Adobe PDF(1286Kb)  |  Favorite  |  View/Download:44/0  |  Submit date:2016/11/23
Fabrication of submicron photon sieve using E-beam lithography and X-ray lithography 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 10, 页码: 3178-3181
Authors:  Jiang, Wenbo;  Hu, Song;  Xie, Changqing;  Zhu, Xiaoli;  Zhao, Lixin;  Xie, Weicheng;  Wang, Jun;  Dong, Xiucheng
Favorite  |  View/Download:78/0  |  Submit date:2015/09/21
Submicron Photon Sieve  E-beam Lithography  X-ray Lithography  Key Technique  Error Analysis