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Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy 会议论文
Proceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS, Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
Authors:  Xie, Zhongye;  Tang, Yan;  Liu, Xi;  Yang, Kejun;  Hu, Song
Adobe PDF(1425Kb)  |  Favorite  |  View/Download:7/0  |  Submit date:2019/08/23
thin films  Fourier transform  microscopy  surface topography  digital micro-mirror devices  modulation  
Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry 会议论文
0277-786X
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
Adobe PDF(606Kb)  |  Favorite  |  View/Download:30/0  |  Submit date:2018/12/20
Microstructure - Modulation - Surface topography - Units of measurement  
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian;  Zhao, Lixin
Adobe PDF(2592Kb)  |  Favorite  |  View/Download:19/0  |  Submit date:2018/11/20
Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement  
Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry 期刊论文
Micromachines, 2017, 卷号: 8, 期号: 11, 页码: 319
Authors:  Zhou, Yi;  Tang, Yan;  Yang, Yong;  Hu, Song
Adobe PDF(4569Kb)  |  Favorite  |  View/Download:20/0  |  Submit date:2018/11/20
Microstructure - Modulation - Pixels - Topography  
Topography measurement of micro structure by modulation-based method 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505
Authors:  Zhou, Yi;  Tang, Yan;  Liu, Junbo;  Deng, Qinyuan;  Cheng, Yiguang;  Hu, Song
Adobe PDF(505Kb)  |  Favorite  |  View/Download:32/0  |  Submit date:2018/06/14
Interferometry  Light Sources  Manufacture  Materials Testing  Microstructure  Optical Devices  Pixels  Surface Measurement  Topography