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Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 15, 页码: 4145-4152
Authors:  Fan, Zhentao;  Tang, Yuanyuan;  Wei, Kai;  Zhang, Yudong
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Calibration  Ellipsometry  Focusing  Light measurement  Matrix algebra