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基于线阵CCD的高速光刻检焦技术 期刊论文
红外与激光工程, 2015, 卷号: 44, 期号: 8, 页码: 2389-2394
Authors:  陈昌龙;  邸成良;  唐小萍;  胡松
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光刻  检焦  Fpga  线阵ccd  
Intelligent control system based on ARM for lithography tool 会议论文
, 2014
Authors:  Chen, Changlong;  Tang, Xiaoping;  Hu, Song;  Wang, Nan
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用于光刻投影物镜微调的压电陶瓷驱动器设计 期刊论文
压电与声光, 2013, 期号: 1, 页码: 94-97
Authors:  胡博;  唐小萍;  胡松;  胡志成
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压电陶瓷  驱动器  高压运放  高精度  仿真分析  
Research of communication mechanism based USB in wafer stage of lithography 会议论文
, 2012
Authors:  Sheng, Zhuang;  Tang, Xiaoping;  Li, Jinlong;  Sheng, Z. (szz0000@126.com)
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基于模糊PID的光刻机同步扫描控制 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 9, 页码: 591-595+605
Authors:  盛壮;  唐小萍;  胡松;  李兰兰;  谢飞;  李金龙;  徐锋
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Research on focusing technique based on dual-phase lock-in amplifier in 193nm lithography system 会议论文
, 2010
Authors:  Fei Xie;  Xiaoping Tang;  Song Hu;  Wei Yan
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Positioning scheme based on grating modulation and phase imaging in lithography 会议论文
, 2010
Authors:  Shaolin Zhou;  Feng Xu;  Song Hu;  Xiaoping Tang
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Alignment for double-side deep-exposure lithography tool 会议论文
, 2010
Authors:  Ma Ping;  Fu Xiaofang;  Yang Chunli;  Hu Song;  Tang Xiaoping
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纳米检焦中双相锁相放大器的Simulink建模与仿真 期刊论文
光子学报, 2010, 卷号: 39, 期号: 3, 页码: 397-402
Authors:  谢飞;  唐小萍;  胡松;  严伟
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数字灰度投影光刻技术 期刊论文
微纳电子技术, 2009, 卷号: 46, 期号: 3, 页码: 181-185
Authors:  赵立新;  严伟;  王建;  胡松;  唐小萍;  王肇志;  王淑蓉;  张正荣;  张雨东
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