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Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
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Proximity Lithography  Mask-wafer Alignment  Phase Analysis  Spatial Frequency  
Gap-optimized Moiré phase imaging alignment for proximity lithography 期刊论文
Optical Engineering, 2015, 卷号: 54, 期号: 1, 页码: 17105
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
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Adjustment strategy for inclination moiré fringes in lithography by spatial frequency decomposition 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
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Gap-optimized Moire phase imaging alignment for proximity lithography 期刊论文
OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
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Lithography  Alignment  Moire Techniques  
基于PMD的反射镜面检测实验分析 期刊论文
光学学报, 2013, 卷号: 33, 期号: 1, 页码: 98-101
Authors:  赵文川;  范斌;  伍凡;  苏显渝;  陈文静
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测量  面形测量  非球面镜  条纹分析  
Three-dimensional shape measurement of large-aperture aspheric mirrors by off-axis null Ronchi test 期刊论文
APPLIED OPTICS, 2012, 卷号: 51, 期号: 9, 页码: 1276-1282
Authors:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan
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Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2012, 卷号: 50, 期号: 2, 页码: 165-169
Authors:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan
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Optical Testing  Aspheric Mirror  Ronchi Test  3d Surface Measurement  Fringe Analysis  
Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test 期刊论文
Optics and Lasers in Engineering, 2012, 卷号: 50, 期号: 2, 页码: 165-169
Authors:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan;  Su, X. (xianyusu@mail.sc.cninfo.net)
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Three-dimensional shape measurement of large-aperture aspheric mirrors by off-axis null Ronchi test 期刊论文
Applied Optics, 2012, 卷号: 51, 期号: 9, 页码: 1276-1282
Authors:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan;  Su, X. (xianyusu@mail.sc.cninfo.net)
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Reconstructing in laser wavelength scanning interference test of aspheric surface 会议论文
, 2012
Authors:  Li, Lulu;  Zhao, Wenchuan;  Su, Xianyu;  Wu, Fan;  Fan, Bin;  Li, L.
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