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Analysis of fabricating arbitrary nanoscale patterns by LSPP direct writing lithography with two-dimensional metal hole-array 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 1931-1934
Authors:  Shi, Sha;  Zhang, Zhiyou;  Shi, Ruiying;  Niu, Xiaoyun;  Li, Shuhong;  Li, Min;  Wang, Jingquan;  Du, Jinglei;  Gao, Fuhua;  Du, Chunlei
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Tmh  Local Surface Plasmon Polariton  Parallel Direct Writing Lithography