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Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene 期刊论文
MICROELECTRONIC ENGINEERING, 2016, 卷号: 149, 页码: 52-56
Authors:  Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Cao, Axiu;  Pang, Hui;  Hu, Song
Favorite  |  View/Download：106/0  |  Submit date：2016/02/25
Nanopillar Array  High Aspect Ratio  Thiol-ene  Aao Template  
Fabrication of circular microstructure array based on a controlled diffractive pattern 期刊论文
MICROELECTRONIC ENGINEERING, 2014, 卷号: 115, 页码: 13-15
Authors:  Li, Shuhong;  Du, Jinglei;  Zhang, Zhiyou;  Gao, Fuhua;  Gao, Hongtao;  Du, Chunlei
Favorite  |  View/Download：116/0  |  Submit date：2015/07/10
Lithography  Circular Microstructure  Diffractive Pattern  
Fabrication of circular microstructure array based on a controlled diffractive pattern 期刊论文
Microelectronic Engineering, 2014, 卷号: 115, 页码: 13-15
Authors:  Li, Shuhong;  Du, Jinglei;  Zhang, Zhiyou;  Gao, Fuhua;  Gao, Hongtao;  Du, Chunlei;  Li, S. (lsh2772@scu.edu.cn)
Adobe PDF(672Kb)  |  Favorite  |  View/Download：61/0  |  Submit date：2016/11/23
Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process 期刊论文
MICROELECTRONIC ENGINEERING, 2013, 卷号: 110, 页码: 35-39
Authors:  Fang, Liang;  Pan, Li;  Wang, Changtao;  Luo, Xiangang
Favorite  |  View/Download：139/0  |  Submit date：2015/04/17
Super Lens  Surface Plasmon  Lithography  Tr-layer Resist Process  
Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process 期刊论文
Microelectronic Engineering, 2013, 卷号: 110, 页码: 35-39
Authors:  Fang, Liang;  Pan, Li;  Wang, Changtao;  Luo, Xiangang;  Luo, X. (lxg@ioe.ac.cn)
Adobe PDF(1851Kb)  |  Favorite  |  View/Download：50/0  |  Submit date：2016/11/22
Using self-assembly technology to fabricate silver particle array for organic photovoltaic devices 期刊论文
MICROELECTRONIC ENGINEERING, 2012, 卷号: 98, 页码: 428-432
Authors:  Hou, Yidong;  Li, Shuhong;  Ye, Song;  Shi, Sha;  Zhang, Maoguo;  Shi, Ruiying;  Du, Jinglei;  Du, Chunlei
Favorite  |  View/Download：88/0  |  Submit date：2015/07/10
Self-assembly  Nano-prism Array  Photovoltaic Devices  
Fabrication of submicron photon sieve using E-beam lithography and X-ray lithography 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 10, 页码: 3178-3181
Authors:  Jiang, Wenbo;  Hu, Song;  Xie, Changqing;  Zhu, Xiaoli;  Zhao, Lixin;  Xie, Weicheng;  Wang, Jun;  Dong, Xiucheng
Favorite  |  View/Download：81/0  |  Submit date：2015/09/21
Submicron Photon Sieve  E-beam Lithography  X-ray Lithography  Key Technique  Error Analysis  
Experimental analysis of solid immersion interference lithography based on backside exposure technique 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 2509-2512
Authors:  Li, Xupeng;  Shi, Sha;  Zhang, Zhiyou;  Wang, Jingquan;  Li, Shuhong;  Gao, Fuhua;  Shi, Ruiying;  Du, Jinglei;  Du, Chunlei;  Zhang, Yixiao
Favorite  |  View/Download：72/0  |  Submit date：2015/09/21
Solid Immersion  Interference Lithography  Backside Exposure Technique  
Analysis of fabricating arbitrary nanoscale patterns by LSPP direct writing lithography with two-dimensional metal hole-array 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 1931-1934
Authors:  Shi, Sha;  Zhang, Zhiyou;  Shi, Ruiying;  Niu, Xiaoyun;  Li, Shuhong;  Li, Min;  Wang, Jingquan;  Du, Jinglei;  Gao, Fuhua;  Du, Chunlei
Favorite  |  View/Download：71/0  |  Submit date：2015/09/21
Tmh  Local Surface Plasmon Polariton  Parallel Direct Writing Lithography  
One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film 期刊论文
MICROELECTRONIC ENGINEERING, 2009, 卷号: 86, 期号: 4-6, 页码: 1096-1098
Authors:  Zhu, Jianhua;  Jin, Chongwei;  Duan, Xiaoya;  Guo, Yongkang;  Yao, Jun
Favorite  |  View/Download：75/0  |  Submit date：2015/09/21
Microoptical Element  Microlens Array  Gray-tone Photolithography  Silver-halide-sensitized Gelatin  Enzyme