IOE OpenIR

Browse/Search Results:  1-10 of 19 Help

  Show only claimed items
Selected(0)Clear Items/Page:    Sort:
Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382
Authors:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong;  Li, Jinlong;  Hu, Song
Adobe PDF(1383Kb)  |  Favorite  |  View/Download:26/0  |  Submit date:2019/08/23
Surface measurement  noise suppression  spatial modulation  
光刻中的自成像效应研究 学位论文
, 北京: 中国科学院研究生院, 2017
Authors:  刘俊伯
Adobe PDF(6753Kb)  |  Favorite  |  View/Download:136/4  |  Submit date:2017/06/14
基于塔尔博特自成像光刻机的照明系统设计与分析 期刊论文
激光与光电子学进展, 2017, 卷号: 54, 期号: 8, 页码: 260-268
Authors:  佟军民;  刘俊伯;  胡松
Adobe PDF(7821Kb)  |  Favorite  |  View/Download:34/0  |  Submit date:2018/12/20
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian;  Zhao, Lixin
Adobe PDF(2592Kb)  |  Favorite  |  View/Download:19/0  |  Submit date:2018/11/20
Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement  
Spatial modulation assisted scanning white-light interferometry for noise suppression 期刊论文
IEEE Photonics Technology Letters, 2017
Authors:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong;  Li, Jinlong;  Hu, Song
Adobe PDF(1382Kb)  |  Favorite  |  View/Download:18/0  |  Submit date:2018/11/20
Bandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement  
Focusing Properties of Single-Focus Photon Sieve 期刊论文
IEEE Photonics Technology Letters, 2017, 卷号: 29, 期号: 3, 页码: 275-278
Authors:  Cheng, Yiguang;  Zhu, Jiangping;  Hu, Song;  Zhao, Lixin;  Yan, Wei;  He, Yu;  Jiang, Weibo;  Liu, Junbo
Adobe PDF(1197Kb)  |  Favorite  |  View/Download:14/0  |  Submit date:2018/11/20
Diffractive optics - Focusing - Photons - Sieves  
Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
Authors:  Zhou, Shaolin;  Liu, Junbo;  Deng, Qian;  Xie, Changqing;  Chan, Mansun
Favorite  |  View/Download:72/0  |  Submit date:2016/10/27
Diffraction  Photolithography  Terahertz Filters  Hexagonal Array  
Clad photon sieve for generating localized hollow beams 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2016, 卷号: 77, 页码: 18-25
Authors:  Cheng, Yiguang;  Tong, Junmin;  Zhu, Jiangping;  Liu, Junbo;  Hu, Song;  He, Yu
Favorite  |  View/Download:78/0  |  Submit date:2016/02/03
Photon Sieve  Localized Hollow Beam  Imaging Characterization  Optical Tweezers  
Topography measurement of micro structure by modulation-based method 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505
Authors:  Zhou, Yi;  Tang, Yan;  Liu, Junbo;  Deng, Qinyuan;  Cheng, Yiguang;  Hu, Song
Adobe PDF(505Kb)  |  Favorite  |  View/Download:32/0  |  Submit date:2018/06/14
Interferometry  Light Sources  Manufacture  Materials Testing  Microstructure  Optical Devices  Pixels  Surface Measurement  Topography  
Thickness measurement of transparent film by white-light interferometry 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968506
Authors:  Deng, Qinyuan;  Zhou, Yi;  Liu, Junbo;  Yao, Jingwei;  Hu, Song
Adobe PDF(4133Kb)  |  Favorite  |  View/Download:61/0  |  Submit date:2018/06/14
Film Thickness  Manufacture  Materials Testing  Optical Devices  Optical Films  Reflection  Reflectometers  Structural Design  Thickness Gages  Thickness Measurement  Thin Films