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基于静电排斥力的大冲程MEMS变形镜 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 4, 页码: 242-247
Authors:  陈科帆;  姚军;  高福华;  汪为民;  倪祖高
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Characteristics of sensors based on MEMS grating with interdigitated comb structures 会议论文
, 2010
Authors:  Naike Wei;  Weimin Wang;  Jun Yao;  Kefan Chen;  Jianhua Zhu;  Fuhua Gao
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