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光刻机 信息时代的制造之王 期刊论文
百科知识, 2020, 期号: 32, 页码: 4-9
Authors:  唐燕;  胡松;  何渝
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光刻机  芯片制造  
Measurement of Wafer Focus by Grating Shearing Interferometry 期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10217467-1-8
Authors:  Wang, Jian;  Hu, Song;  Zhu, Xianchang
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Focusing  Grating  Shearing Interferometry  Lithography  
Coated hihg-refractive-index Barium Titanate Glass Microspheres for optically Trapped Microsphere Super-resolution Microscopy:A Simulation Study 期刊论文
MDPI Photonics, 2020, 卷号: 7, 期号: 4, 页码: 84
Authors:  Liu, Xi;  Hu,Song;  Tang Yan
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Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope 期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10176110-1-12
Authors:  Jin, Chuan;  He, Yu;  Tang, Yan;  Xie, Zhongye;  Zhao, Lixin;  Hu, Song
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Multi-angle Stitching  Digital Holography Microscope  Large Gradient Micro-structure  Topography Measurement  
Quick image stitching algorithm based on template matching for Mask defect detection 会议论文
Journal of Physics: Conference Series, Chongqing, China, January 18, 2020 - January 19, 2020
Authors:  Wei, Hongbin;  Hu, Song
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Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy 期刊论文
IEEE Photonics Technology Letters, 2020, 卷号: 32, 期号: 9, 页码: 522-525
Authors:  Wei, Haojie;  Hu, Song;  Tang, Yan;  Xie, Zhongye;  Liu, Xi;  He, Yu;  Liu, Junbo
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Selecting a Proper Microsphere to Combine Optical Trapping with Microsphere-Assisted Microscopy 期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10093127-1-11
Authors:  Liu, Xi;  Hu, Song;  Tang, Yan;  Xie, Zhongye;  Liu, Junbo;  He, Yu
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Optical Trapping  Super-resolution Microscopy  Microsphere  Photonic Nanojet  
Intensity modulation based optical proximity optimization for the maskless lithography 期刊论文
OPTICS EXPRESS, 2020, 卷号: 28, 期号: 1, 页码: 548-557
Authors:  Liu, Jianghui;  Liu, Junbo;  Deng, Qingyuan;  Feng, Jinhua;  Zhou, Shaolin;  Hu, Song
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3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy 期刊论文
IEEE Photonics Technology Letters, 2019, 卷号: 31, 期号: 22, 页码: 1783-1786
Authors:  Xie, Zhongye;  Hu, Song;  Tang, Yan;  Liu, Xi;  Liu, Junbo;  He, Yu
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Microscopy  surface topography  microsphere  
Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique 期刊论文
Applied Optics, 2019, 卷号: 58, 期号: 30, 页码: 8180-8186
Authors:  Liu, Lei;  Tang, Yan;  Xie, Zhongye;  Feng, Jinhua;  He, Yu;  Hu, Song
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