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Fabrication of circular microstructure array based on a controlled diffractive pattern 期刊论文
MICROELECTRONIC ENGINEERING, 2014, 卷号: 115, 页码: 13-15
Authors:  Li, Shuhong;  Du, Jinglei;  Zhang, Zhiyou;  Gao, Fuhua;  Gao, Hongtao;  Du, Chunlei
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Lithography  Circular Microstructure  Diffractive Pattern  
Fabrication of circular microstructure array based on a controlled diffractive pattern 期刊论文
Microelectronic Engineering, 2014, 卷号: 115, 页码: 13-15
Authors:  Li, Shuhong;  Du, Jinglei;  Zhang, Zhiyou;  Gao, Fuhua;  Gao, Hongtao;  Du, Chunlei;  Li, S. (lsh2772@scu.edu.cn)
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Immersed nanospheres super-lithography for the fabrication of sub-70nm nanoholes with period below 700nm 会议论文
, 2012
Authors:  Li, Shuhong;  Shi, Lifang;  Yang, Zheng;  Huang, Xia;  Zhang, Zhiyou;  Gao, Fuhua;  Guo, Yongkang;  Yu, Weixing;  Du, Jinglei;  Li, S. (lsh2772@yahoo.com.cn)
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A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity 会议论文
, 2012
Authors:  Li, Shuhong;  Shi, Lifang;  Yang, Zheng;  Huang, Xia;  Zhang, Zhiyou;  Gao, Fuhua;  Guo, Yongkang;  Yu, Weixing;  Du, Jinglei;  Li, S. (lsh2772@yahoo.com.cn)
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Experimental analysis of solid immersion interference lithography based on backside exposure technique 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 2509-2512
Authors:  Li, Xupeng;  Shi, Sha;  Zhang, Zhiyou;  Wang, Jingquan;  Li, Shuhong;  Gao, Fuhua;  Shi, Ruiying;  Du, Jinglei;  Du, Chunlei;  Zhang, Yixiao
Favorite  |  View/Download：74/0  |  Submit date：2015/09/21
Solid Immersion  Interference Lithography  Backside Exposure Technique  
Analysis of fabricating arbitrary nanoscale patterns by LSPP direct writing lithography with two-dimensional metal hole-array 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 1931-1934
Authors:  Shi, Sha;  Zhang, Zhiyou;  Shi, Ruiying;  Niu, Xiaoyun;  Li, Shuhong;  Li, Min;  Wang, Jingquan;  Du, Jinglei;  Gao, Fuhua;  Du, Chunlei
Favorite  |  View/Download：73/0  |  Submit date：2015/09/21
Tmh  Local Surface Plasmon Polariton  Parallel Direct Writing Lithography  
非正交二维MEMS倾斜镜的研制 期刊论文
光学精密工程, 2011, 卷号: 19, 期号: 8, 页码: 1845-1851
Authors:  庄须叶;  汪为民;  陶逢刚;  姚军;  高福华
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基于静电排斥力的大冲程MEMS变形镜 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 4, 页码: 242-247
Authors:  陈科帆;  姚军;  高福华;  汪为民;  倪祖高
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A miniaturized spectrometer based on optical modulator composed of grating and tunable Fabry-Perot 期刊论文
Key Engineering Materials, 2011, 卷号: 483, 页码: 447-451
Authors:  WEi Naike;  Ni Zhugao;  Yao Jun;  Zhu Jianhua;  Gao Fuhua
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基于旋转相位调制的复杂光场相位恢复算法 期刊论文
光学学报, 2010, 期号: 9, 页码: 2629-2633
Authors:  黄利新;  姚军;  高福华;  陈剑鸣;  宫爱玲
Adobe PDF(377Kb)  |  Favorite  |  View/Download：56/0  |  Submit date：2016/11/22