×
验证码:
换一张
Forgotten Password?
Stay signed in
×
Log In
Chinese
|
English
中国科学院光电技术研究所机构知识库
Knowledge Management System Of Institute of optics and electronics, CAS
Log In
Register
ALL
ORCID
Title
Creator
Subject Area
Keyword
Funding Project
Document Type
Source Publication
Indexed By
Publisher
Date Issued
Date Accessioned
MOST Discipline Catalogue
Study Hall
Image search
Paste the image URL
Home
Collections
Authors
DocType
Subjects
K-Map
News
Search in the results
Collection
微细加工光学技术国家... [6]
光电技术研究所被Wo... [3]
微电子装备总体研究室... [3]
Authors
Document Type
Journal ar... [9]
Conference... [3]
Date Issued
2014 [2]
2012 [2]
2011 [5]
2010 [3]
Language
英语 [8]
中文 [4]
Source Publication
MICROELECT... [3]
Key Engine... [1]
Microelect... [1]
光学学报 [1]
光学精密工程 [1]
微纳电子技术 [1]
More...
Funding Project
Indexed By
EI [4]
SCI [4]
ISTP [1]
Funding Organization
National N... [1]
×
Knowledge Map
IOE OpenIR
Start a Submission
Submissions
Unclaimed
Claimed
Attach Fulltext
Bookmarks
QQ
Weibo
Feedback
Browse/Search Results:
1-10 of 12
Help
Selected(
0
)
Clear
Items/Page:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort:
Select
Issue Date Ascending
Issue Date Descending
Submit date Ascending
Submit date Descending
Journal Impact Factor Ascending
Journal Impact Factor Descending
Title Ascending
Title Descending
WOS Cited Times Ascending
WOS Cited Times Descending
Author Ascending
Author Descending
Fabrication of circular microstructure array based on a controlled diffractive pattern
期刊论文
MICROELECTRONIC ENGINEERING, 2014, 卷号: 115, 页码: 13-15
Authors:
Li, Shuhong
;
Du, Jinglei
;
Zhang, Zhiyou
;
Gao, Fuhua
;
Gao, Hongtao
;
Du, Chunlei
Favorite
  |  
View/Download:117/0
  |  
Submit date:2015/07/10
Lithography
Circular Microstructure
Diffractive Pattern
Fabrication of circular microstructure array based on a controlled diffractive pattern
期刊论文
Microelectronic Engineering, 2014, 卷号: 115, 页码: 13-15
Authors:
Li, Shuhong
;
Du, Jinglei
;
Zhang, Zhiyou
;
Gao, Fuhua
;
Gao, Hongtao
;
Du, Chunlei
;
Li, S. (lsh2772@scu.edu.cn)
Adobe PDF(672Kb)
  |  
Favorite
  |  
View/Download:63/0
  |  
Submit date:2016/11/23
Immersed nanospheres super-lithography for the fabrication of sub-70nm nanoholes with period below 700nm
会议论文
, 2012
Authors:
Li, Shuhong
;
Shi, Lifang
;
Yang, Zheng
;
Huang, Xia
;
Zhang, Zhiyou
;
Gao, Fuhua
;
Guo, Yongkang
;
Yu, Weixing
;
Du, Jinglei
;
Li, S. (lsh2772@yahoo.com.cn)
Adobe PDF(762Kb)
  |  
Favorite
  |  
View/Download:46/0
  |  
Submit date:2016/11/24
A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity
会议论文
, 2012
Authors:
Li, Shuhong
;
Shi, Lifang
;
Yang, Zheng
;
Huang, Xia
;
Zhang, Zhiyou
;
Gao, Fuhua
;
Guo, Yongkang
;
Yu, Weixing
;
Du, Jinglei
;
Li, S. (lsh2772@yahoo.com.cn)
Adobe PDF(882Kb)
  |  
Favorite
  |  
View/Download:55/0
  |  
Submit date:2016/11/24
Experimental analysis of solid immersion interference lithography based on backside exposure technique
期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 2509-2512
Authors:
Li, Xupeng
;
Shi, Sha
;
Zhang, Zhiyou
;
Wang, Jingquan
;
Li, Shuhong
;
Gao, Fuhua
;
Shi, Ruiying
;
Du, Jinglei
;
Du, Chunlei
;
Zhang, Yixiao
Favorite
  |  
View/Download:74/0
  |  
Submit date:2015/09/21
Solid Immersion
Interference Lithography
Backside Exposure Technique
Analysis of fabricating arbitrary nanoscale patterns by LSPP direct writing lithography with two-dimensional metal hole-array
期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 1931-1934
Authors:
Shi, Sha
;
Zhang, Zhiyou
;
Shi, Ruiying
;
Niu, Xiaoyun
;
Li, Shuhong
;
Li, Min
;
Wang, Jingquan
;
Du, Jinglei
;
Gao, Fuhua
;
Du, Chunlei
Favorite
  |  
View/Download:73/0
  |  
Submit date:2015/09/21
Tmh
Local Surface Plasmon Polariton
Parallel Direct Writing Lithography
非正交二维MEMS倾斜镜的研制
期刊论文
光学精密工程, 2011, 卷号: 19, 期号: 8, 页码: 1845-1851
Authors:
庄须叶
;
汪为民
;
陶逢刚
;
姚军
;
高福华
Adobe PDF(2432Kb)
  |  
Favorite
  |  
View/Download:51/0
  |  
Submit date:2016/11/22
基于静电排斥力的大冲程MEMS变形镜
期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 4, 页码: 242-247
Authors:
陈科帆
;
姚军
;
高福华
;
汪为民
;
倪祖高
Adobe PDF(1473Kb)
  |  
Favorite
  |  
View/Download:74/0
  |  
Submit date:2016/11/22
A miniaturized spectrometer based on optical modulator composed of grating and tunable Fabry-Perot
期刊论文
Key Engineering Materials, 2011, 卷号: 483, 页码: 447-451
Authors:
WEi Naike
;
Ni Zhugao
;
Yao Jun
;
Zhu Jianhua
;
Gao Fuhua
Adobe PDF(234Kb)
  |  
Favorite
  |  
View/Download:37/0
  |  
Submit date:2016/11/22
基于旋转相位调制的复杂光场相位恢复算法
期刊论文
光学学报, 2010, 期号: 9, 页码: 2629-2633
Authors:
黄利新
;
姚军
;
高福华
;
陈剑鸣
;
宫爱玲
Adobe PDF(377Kb)
  |  
Favorite
  |  
View/Download:56/0
  |  
Submit date:2016/11/22