IOE OpenIR

Browse/Search Results:  1-5 of 5 Help

Selected(0)Clear Items/Page:    Sort:
Objective visual performance evaluation with visual evoked potential measurements based on an adaptive optics system 期刊论文
CHINESE OPTICS LETTERS, 2018, 卷号: 16, 期号: 5, 页码: 53301
Authors:  Yang, Yanrong;  Zhao, Junlei;  Zhao, Haoxin;  Xiao, Fei;  Xie, Jiaxin;  Liu, Tiejun;  Dai, Yun
Adobe PDF(702Kb)  |  Favorite  |  View/Download:29/0  |  Submit date:2019/08/23
Function evaluation  
基于锁定放大原理的投影光刻检焦技术研究 学位论文
, 北京: 中国科学院研究生院, 2011
Authors:  谢飞
Adobe PDF(7138Kb)  |  Favorite  |  View/Download:113/1  |  Submit date:2014/12/11
光学投影光刻  焦深  检焦技术  离焦量  锁定放大法  
基于模糊PID的光刻机同步扫描控制 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 9, 页码: 591-595+605
Authors:  盛壮;  唐小萍;  胡松;  李兰兰;  谢飞;  李金龙;  徐锋
Adobe PDF(1111Kb)  |  Favorite  |  View/Download:37/0  |  Submit date:2016/11/23
Research on focusing technique based on dual-phase lock-in amplifier in 193nm lithography system 会议论文
, 2010
Authors:  Fei Xie;  Xiaoping Tang;  Song Hu;  Wei Yan
Adobe PDF(322Kb)  |  Favorite  |  View/Download:50/0  |  Submit date:2016/11/24
纳米检焦中双相锁相放大器的Simulink建模与仿真 期刊论文
光子学报, 2010, 卷号: 39, 期号: 3, 页码: 397-402
Authors:  谢飞;  唐小萍;  胡松;  严伟
Adobe PDF(876Kb)  |  Favorite  |  View/Download:38/0  |  Submit date:2016/11/23