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Objective visual performance evaluation with visual evoked potential measurements based on an adaptive optics system 期刊论文
CHINESE OPTICS LETTERS, 2018, 卷号: 16, 期号: 5, 页码: 53301
Authors:  Yang, Yanrong;  Zhao, Junlei;  Zhao, Haoxin;  Xiao, Fei;  Xie, Jiaxin;  Liu, Tiejun;  Dai, Yun
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Function evaluation  
基于锁定放大原理的投影光刻检焦技术研究 学位论文
, 北京: 中国科学院研究生院, 2011
Authors:  谢飞
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光学投影光刻  焦深  检焦技术  离焦量  锁定放大法  
基于模糊PID的光刻机同步扫描控制 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 9, 页码: 591-595+605
Authors:  盛壮;  唐小萍;  胡松;  李兰兰;  谢飞;  李金龙;  徐锋
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Research on focusing technique based on dual-phase lock-in amplifier in 193nm lithography system 会议论文
, 2010
Authors:  Fei Xie;  Xiaoping Tang;  Song Hu;  Wei Yan
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纳米检焦中双相锁相放大器的Simulink建模与仿真 期刊论文
光子学报, 2010, 卷号: 39, 期号: 3, 页码: 397-402
Authors:  谢飞;  唐小萍;  胡松;  严伟
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