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Correction algorithm of edge effects in inductively coupled plasma processing 期刊论文
Optik, 2020, 卷号: 223
Authors:  Zhang, Shiyang;  Fan, Bin;  Wang, Yongjian;  Xin, Qiang;  Wu, Jie
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Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes 期刊论文
Optics Express, 2020, 卷号: 28, 期号: 22, 页码: 33739-33746
Authors:  Zhang, Jingwen;  Li, Zhiwei;  Shao, Junming;  Liu, Dun;  Fan, Bin;  Li, Bincheng
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Superposition of micropattern and microlens arrays for improved dynamic moiré pattern 期刊论文
Physica Scripta, 2020, 卷号: 95, 期号: 5
Authors:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
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moire  dynamic  microlens array  display  
Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method 期刊论文
SCIENTIFIC REPORTS, 2020, 卷号: 10, 期号: 1, 页码: 9005-1-8
Authors:  Gao, Guohan;  Wang, Lihua;  Shi, Heng;  Liu, Dun;  Fan, Bin;  Guan, Chunlin
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High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application 期刊论文
IEEE Photonics Journal, 2020, 卷号: 12, 期号: 4, 页码: 2400310-1-10
Authors:  Liu, Xin;  Gong, Changchang;  Fan, Bin;  Bian, Jiang
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Flexible Membrane  Diffractive Optical Elements  Polyimide  Contact Lithography  Microstructure Morphology Error  Wave-front Error  
Wide-band high-resolution synthetic imaging of a segmented large-scaled lightweight diffractive telescope 期刊论文
Optics Letters, 2020, 卷号: 45, 期号: 7, 页码: 1790-1793
Authors:  Liu, Yang;  Xie, Zongliang;  Ma, Haotong;  Chu, Junqiu;  Ma, Xiafei;  Tan, Yufeng;  Liu, Dun;  Bian, Jiang;  Hu, Hongyi;  Fan, Bin;  Qi, Bo
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大口径石英基底衍射透镜的高精度制备方法 期刊论文
光子学报, 2020, 卷号: 49, 期号: 5, 页码: 178-187
Authors:  巩畅畅;  范斌;  邵俊铭;  刘鑫
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接触式曝光  掩模版  形变量  大口径衍射透镜  高平面度  
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates 期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
Authors:  Zhang, Jingwen;  Fan, Bin;  Li, Zhiwei;  Gao, Guohan;  Li, Bincheng;  Yan, Zhiwu
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Reactive Ion Etching  Capacitive Coupled Discharge  Fluid Simulation  Discharge Parameter  Large Area Sio2 Substrates  Plasma Radial Uniformity  
Optical design of compact unobscured ground-based diffractive telescope 期刊论文
Optik, 2020, 卷号: 205
Authors:  He, Chuanwang;  Huang, Peng;  Dong, Xiaochun;  Fan, Bin
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Diffractive telescope  Unobscured  Compact  Loose tolerance  Flat-field mirror  
Simplified unobscured optics design for a diffractive telescope 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 6, 页码: 1660-1666
Authors:  He, Chuanwang;  Huang, Peng;  He, Yiwei;  Dong, Xiaochun;  Fan, Bin
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