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Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography 期刊论文
Advanced Optical Materials, 2017, 卷号: 5, 期号: 21, 页码: 1700429
Authors:  Liu, Liqin;  Zhang, Xiaohu;  Zhao, Zeyu;  Pu, Mingbo;  Gao, Ping;  Luo, Yunfei;  Jin, Jinjin;  Wang, Changtao;  Luo, Xiangang
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Electric fields - Electron beam lithography - Fabrication - Holography - Ion beams - Lithography - Masks - Nanostructures - Photoresists - Plasmons  
Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 17, 页码: 20511-20521
Authors:  Liu, Hongchao;  Kong, Weijie;  Liu, Kaipeng;  Zhao, Chengwei;  Du, Wenjuan;  Wang, Changtao;  Liu, Ling;  Gao, Ping;  Pu, Mingbo;  Luo, Xiangang
Adobe PDF(6898Kb)  |  Favorite  |  View/Download:25/0  |  Submit date:2018/11/20
HIGH-ASPECT-RATIO  PHOTONIC CRYSTALS  EUV LITHOGRAPHY  FABRICATION  DIFFRACTION  NANOLITHOGRAPHY  EXTREME  
Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review 期刊论文
MICROMACHINES, 2016, 卷号: 7, 期号: 7
Authors:  Wang, Changtao;  Zhang, Wei;  Zhao, Zeyu;  Wang, Yanqin;  Gao, Ping;  Luo, Yunfei;  Luo, Xiangang
Favorite  |  View/Download:69/0  |  Submit date:2016/11/15
Surface Plasmon Polaritons  Bulk Plasmon Polaritons  Diffraction Limit  Subwavelength Optics  Near-field Optics  Metamaterial  Super Resolution  Nano Optical Lithography  Nanostructure Fabrication  
A new flexible hybrid mask for contact exposure and its fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q
Authors:  Liu, Xin;  Zhang, Man;  Cao, A-Xiu;  Pang, Hui;  Wang, Jia-Zhou;  Deng, Qi-Ling
Adobe PDF(345Kb)  |  Favorite  |  View/Download:54/0  |  Submit date:2018/06/14
Elastic Moduli  Fabrication  Lithography  Manufacture  Nanostructures  Optical Devices  Photolithography  Photoresists  Polymers  Printing  
Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene 期刊论文
Journal of Nanoscience and Nanotechnology, 2016, 卷号: 16, 期号: 12, 页码: 12316-12320
Authors:  Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Pang, Hui;  Cao, Axiu;  Hu, Song
Adobe PDF(489Kb)  |  Favorite  |  View/Download:31/0  |  Submit date:2018/06/14
Curing  Fabrication  Microchannels  Molds  Nanoimprint Lithography  Nanostructures  Pulse Width Modulation  Substrates  Synthesis (Chemical)  
High-precision structure fabrication based on an etching resistance layer 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2016, 卷号: 9683, 页码: 96830C
Authors:  Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Cao, Axiu;  Pang, Hui;  Liu, Xin;  Wang, Jiazhou;  Hu, Song
Adobe PDF(2732Kb)  |  Favorite  |  View/Download:38/0  |  Submit date:2018/06/14
Fabrication  Manufacture  Photolithography  
Research on controlling middle spatial frequency error of high gradient precise aspheric by pitch tool 期刊论文
Proceedings of SPIE: Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 2016, 卷号: 9927, 页码: 99270J
Authors:  Wang, Jia;  Hou, Xi;  Wan, Yongjian;  Shi, Chunyan;  Zhong, Xianyun
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Fabrication  
A quick algorithm of exposure distribution for fabrication of micro-optical structures 期刊论文
OPTIK, 2010, 卷号: 121, 期号: 11, 页码: 988-992
Authors:  Li, Shuhong;  Du, Chunlei;  Fu, Yongqi
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Microstructure Fabrication  Lenses  Microlithography  
Design and application of phase photon sieve 期刊论文
OPTIK, 2010, 卷号: 121, 期号: 7, 页码: 637-640
Authors:  Jiang, Wenbo;  Hu, Song;  Zhao, Lixin;  Yan, Wei;  Yang, Yong
Favorite  |  View/Download:50/0  |  Submit date:2015/09/21
Imaging Principle  Phase Photon Sieve  Design And Fabrication  Nano-lithography Experiment System  
Near-field visualization of focal depth modulation by step corrugated plasmonic slits 期刊论文
APPLIED PHYSICS LETTERS, 2009, 卷号: 94, 期号: 15
Authors:  Jia, Baohua;  Shi, Haofei;  Li, Jiafang;  Fu, Yongqi;  Du, Chunlei;  Gu, Min
Favorite  |  View/Download:59/0  |  Submit date:2015/09/21
Integrated Optics  Lenses  Light Propagation  Optical Design Techniques  Optical Fabrication  Optical Focusing  Optical Modulation  Plasmonics