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三维微纳结构的光刻及其表面形貌测量方法的研究 学位论文
, 北京: 中国科学院大学, 2018
Authors:  邓钦元
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三维微纳结构  无掩模光刻  非线性  白光干涉  空间调制度  
Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382
Authors:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong;  Li, Jinlong;  Hu, Song
Adobe PDF(1383Kb)  |  Favorite  |  View/Download:62/0  |  Submit date:2019/08/23
Surface measurement  noise suppression  spatial modulation  
Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy 期刊论文
OPTICS EXPRESS, 2018, 卷号: 26, 期号: 3, 页码: 2944-2953
Authors:  Xie, Zhongye;  Tang, Yan;  Zhou, Yi;  Deng, Qinyuan
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Digital devices  Film thickness  Interferometry  Modulation  Thickness measurement  
基于白光干涉频域分析的高精度表面形貌测量 期刊论文
中国激光, 2018, 卷号: 45, 期号: 6, 页码: 604001-604007
Authors:  邓钦元;  唐燕;  周毅;  杨勇;  胡松
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测量  空间频域  白光干涉  2π模糊  相干信息  相位突变  
Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 8, 页码: 2301-2306
Authors:  Zhou, Yi;  Tang, Yan;  Zhu, Jiangping;  Deng, Qinyuan;  Yang, Yong;  Zhao, Lixin;  Hu, Song
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Contrast enhancement of microsphere-assisted super-resolution imaging in dark-field microscopy 期刊论文
APPLIED PHYSICS EXPRESS, 2017, 卷号: 10, 期号: 8
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
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Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry 会议论文
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
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Microstructure - Modulation - Surface topography - Units of measurement  
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
Authors:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian;  Zhao, Lixin
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Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement  
Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography 期刊论文
Micromachines, 2017, 卷号: 8, 期号: 10, 页码: 314
Authors:  Deng, Qinyuan;  Yang, Yong;  Gao, Hongtao;  Zhou, Yi;  He, Yu;  Hu, Song
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Cost effectiveness - Lithography - Microoptics - Photoresists  
Spatial modulation assisted scanning white-light interferometry for noise suppression 期刊论文
IEEE Photonics Technology Letters, 2017
Authors:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong;  Li, Jinlong;  Hu, Song
Adobe PDF(1382Kb)  |  Favorite  |  View/Download:45/0  |  Submit date:2018/11/20
Bandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement