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紫外自成像光刻及其缺陷修复效应研究 学位论文
, 北京: 中国科学院研究生院, 2017
Authors:  邓茜
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白光干涉检测仪垂直扫描系统设计 期刊论文
半导体技术, 2017, 卷号: 42, 期号: 3, 页码: 229-234
Authors:  姚靖威;  唐燕;  周毅;  邓茜;  赵立新;  胡松
Adobe PDF(1292Kb)  |  Favorite  |  View/Download:59/0  |  Submit date:2018/12/20
Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
Authors:  Zhou, Shaolin;  Liu, Junbo;  Deng, Qian;  Xie, Changqing;  Chan, Mansun
Favorite  |  View/Download:93/0  |  Submit date:2016/10/27
Diffraction  Photolithography  Terahertz Filters  Hexagonal Array  
High precision locating control system based on VCM for Talbot lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
Authors:  Yao, Jingwei;  Zhao, Lixin;  Deng, Qian;  Hu, Song
Adobe PDF(501Kb)  |  Favorite  |  View/Download:50/0  |  Submit date:2018/06/14
Control Systems  Digital Signal Processors  Efficiency  Feedback  Lithography  Manufacture  Materials Testing  Optical Devices  Signal Processing  Structural Design  Three Term Control Systems  
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin;  Hu, Song;  Chen, Yinghong
Adobe PDF(527Kb)  |  Favorite  |  View/Download:73/0  |  Submit date:2018/06/14
Crystal Symmetry  Frequency Doublers  Lithography  Manufacture  Microoptics  Optical Devices  Phase Shift  Ultraviolet Spectroscopy  
基于弹性力学的应力加工方法有限元分析 期刊论文
光电工程, 2010, 卷号: 37, 期号: 12, 页码: 17-23
Authors:  孙天祥;  杨力;  吴永前等
Favorite  |  View/Download:44/0  |  Submit date:2016/11/22