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Moire fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
Favorite  |  View/Download:91/0  |  Submit date:2015/12/04
Moiré fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
Adobe PDF(1995Kb)  |  Favorite  |  View/Download:50/0  |  Submit date:2016/11/23