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The Anomaly of Periodicity Doubling in Projection Photolithography of Periodic Features 期刊论文
IEEE Photonics Technology Letters, 2016, 卷号: 28, 期号: 22, 页码: 2529-2532
Authors:  Liu, Junbo;  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  He, Yu;  Chen, Yinghong
Adobe PDF(955Kb)  |  Favorite  |  View/Download:69/0  |  Submit date:2018/06/14
Diffraction  Frequency Doublers  Light Polarization  Phase Shift  
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin;  Hu, Song;  Chen, Yinghong
Adobe PDF(527Kb)  |  Favorite  |  View/Download:73/0  |  Submit date:2018/06/14
Crystal Symmetry  Frequency Doublers  Lithography  Manufacture  Microoptics  Optical Devices  Phase Shift  Ultraviolet Spectroscopy