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三维叠层气浮运动平台控制系统研究 学位论文
, 北京: 中国科学院研究生院, 2015
Authors:  马驰飞
Adobe PDF(4072Kb)  |  Favorite  |  View/Download:183/3  |  Submit date:2015/07/30
高精度运动平台  运动控制系统  多轴运动控制  Pci总线  Can总线  
Moire-Based Absolute Interferometry With Large Measurement Range in Wafer-Mask Alignment 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
Favorite  |  View/Download:84/0  |  Submit date:2015/07/10
Moire Fringes  Measurement Range  Wafer-mask Alignment  Lithography  
Moiré-based absolute interferometry with large measurement range in wafer-mask alignment 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4, 页码: 435-438
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
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基于CAN总线的运动控制通讯系统设计 期刊论文
计算机测量与控制, 2015, 卷号: 23, 期号: 6, 页码: 2120-2122+2125
Authors:  马驰飞;  严伟;  胡松
Adobe PDF(679Kb)  |  Favorite  |  View/Download:56/0  |  Submit date:2016/11/23
Can总线  Fpga  Sja1000  运动控制  数据通讯系统  
Moiré-based absolute interferometry with large measurement range in wafer-mask alignment 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4, 页码: 435-438
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
Adobe PDF(882Kb)  |  Favorite  |  View/Download:69/0  |  Submit date:2016/11/22