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Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文
Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419
Authors:  Wang, Weimin;  Tao, Fenggang;  Wang, Qiang;  Qiu, Chuankai;  Chen, Zexiang;  Fan, Bin
Adobe PDF(1651Kb)  |  Favorite  |  View/Download:40/0  |  Submit date:2018/11/20
Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining  
Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文
Microsystem Technologies, 2015
Authors:  Wang, Weimin;  Tao, Fenggang;  Wang, Qiang;  Qiu, Chuankai;  Chen, Zexiang;  Fan, Bin
Adobe PDF(1773Kb)  |  Favorite  |  View/Download:53/0  |  Submit date:2016/11/22
A Bi-Directional Out-of-Plane Actuator by Electrostatic Force 期刊论文
MICROMACHINES, 2013, 卷号: 4, 期号: 4, 页码: 431-443
Authors:  Ren, Hao;  Wang, Weimin;  Tao, Fenggang;  Yao, Jun
Favorite  |  View/Download:127/0  |  Submit date:2015/04/17
Mems  Out-of-plane Actuator  Electrostatic Repulsive Force  Bi-directional  Microfabrication  Adaptive Optics  
A 19 element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator 会议论文
, 2013
Authors:  Wang, Weimin;  Tao, Fenggang;  Wang, Qiang;  Qiu, Chuankai;  Chen, Zexiang;  Yao, Jun
Adobe PDF(1122Kb)  |  Favorite  |  View/Download:76/0  |  Submit date:2016/11/25
A bi-directional out-of-plane actuator by electrostatic force 期刊论文
Micromachines, 2013, 卷号: 4, 期号: 4, 页码: 431-443
Authors:  Ren, Hao;  Wang, Weimin;  Tao, Fenggang;  Yao, Jun;  Yao, J. (junyao@ioe.ac.cn)
Adobe PDF(911Kb)  |  Favorite  |  View/Download:73/0  |  Submit date:2016/11/22
一种新型微机电系统法布里-珀罗滤波器的设计与分析 期刊论文
光学学报, 2012, 卷号: 32, 期号: 8, 页码: 160-166
Authors:  张建飞;  庄须叶;  汪为民;  陶逢刚;  姚军
Adobe PDF(2632Kb)  |  Favorite  |  View/Download:61/0  |  Submit date:2016/11/22
光学器件  微机电系统  滤波器  光栅  可调谐法布里-珀罗腔  微桥  
新型静电驱动双向平动MEMS变形镜(英文) 期刊论文
纳米技术与精密工程, 2012, 卷号: 10, 期号: 4, 页码: 313-317
Authors:  姚军;  陶逢刚;  任豪等
Adobe PDF(588Kb)  |  Favorite  |  View/Download:98/0  |  Submit date:2016/11/22
双向平动  Mems  变形镜  杠杆驱动器  
MEMS grating with interdigitated-comb structure 会议论文
, 2012
Authors:  Zhang, Heng;  Yao, Jun;  Tao, Fenggang;  Zhuang, Xuye;  Zhang, H. (zhukl@foxmail.com)
Favorite  |  View/Download:53/0  |  Submit date:2016/11/25
A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror 会议论文
, 2012
Authors:  Wang, Weimin;  Tao, Fenggang;  Zhang, Jianfei;  Yao, Jun;  Wang, W. (weiminwang@qq.com)
Favorite  |  View/Download:55/0  |  Submit date:2016/11/25
An out-of-plane electrostatic actuator based on the lever principle 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 卷号: 21, 期号: 4
Authors:  Ren, Hao;  Tao, Fenggang;  Wang, Weimin;  Yao, Jun
Favorite  |  View/Download:83/0  |  Submit date:2015/09/21