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中国科学院光电技术研究所机构知识库
Knowledge Management System Of Institute of optics and electronics, CAS
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纳米投影光刻中的光栅检焦技术研究
学位论文
, 北京: 中国科学院研究生院, 2011
Authors:
陈旺富
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Submit date:2014/12/11
投影光刻
检焦技术
偏振调制
光弹调制
Moire-based focusing and leveling scheme for optical projection lithography
期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 31, 页码: 5959-5963
Authors:
Yan, Wei
;
Yang, Yong
;
Chen, Wangfu
;
Hu, Song
;
Zhou, Shaolin
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Submit date:2015/09/21
Extended dual-grating alignment method for optical projection lithography
期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 4, 页码: 708-713
Authors:
Chen, Wangfu
;
Yan, Wei
;
Hu, Song
;
Yang, Yong
;
Zhou, Shaolin
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View/Download:59/0
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Submit date:2015/09/21
Moire-based focusing and leveling scheme for optical projection lithography
期刊论文
Applied Optics, 2010, 卷号: 49, 期号: 31
Authors:
Yan Wei
;
Yang Yong
;
Chen Wangfu
;
Hu Song
;
Zhou Shaolin
;
Yan W (Yan Wei)
Adobe PDF(501Kb)
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View/Download:39/0
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Submit date:2016/11/23
Extended dual-grating alignment method for optical projection lithography
期刊论文
Applied Optics, 2010, 卷号: 49, 期号: 4, 页码: 708-713
Authors:
Wangfu Chen
;
Wei Yan
;
Song Hu
;
Yong Yang
;
Shaolin Zhou
Adobe PDF(460Kb)
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View/Download:48/0
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Submit date:2016/11/23
An optical modulation based focus method for optical projection lithography
会议论文
, 2010
Authors:
Wangfu Chen
;
Song Hu
Adobe PDF(277Kb)
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View/Download:37/0
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Submit date:2016/11/24
基于矢量衍射理论的振幅型光子筛设计与分析
期刊论文
光电工程, 2010, 卷号: 37, 期号: 8, 页码: 122-126
Authors:
蒋文波
;
胡松
;
赵立新
;
杨勇
;
严伟
;
周绍林
;
陈旺富
Adobe PDF(366Kb)
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Submit date:2016/11/23
Fabrication of Nanoscale Line Width Using the Improved Optical Maskless Lithographic System
期刊论文
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2009, 卷号: 6, 期号: 5, 页码: 1170-1174
Authors:
Jiang, Wenbo
;
Hu, Song
;
Zhao, Lixin
;
Yan, Wei
;
Yang, Yong
;
Zhou, Shaolin
;
Chen, Wangfu
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Submit date:2015/09/21
Maskless Lithography
Key Techniques
Lithographic Experiment
Nanoscale
Beam Splitter Achieved by Using Metallic Structure with Nanoslits
期刊论文
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2009, 卷号: 6, 期号: 5, 页码: 1030-1033
Authors:
Yang, Yong
;
Fu, Yongqi
;
Yao, Hanmin
;
Hu, Song
;
Zhou, Shaolin
;
Yan, Wei
;
Chen, Wangfu
;
Cheng, Guanxiao
;
Li, Zhan
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Submit date:2015/09/21
Beam Splitter
Metallic Nanoslit
Fdtd
微悬臂梁阵列成像系统光学特性分析
期刊论文
四川大学学报, 2009, 卷号: 46, 期号: 4, 页码: 988-992
Authors:
严伟
;
佟军民
;
陈大鹏
;
胡松
;
赵立新
;
杨勇[
;
蒋文波
;
周绍林
;
陈旺富
Adobe PDF(551Kb)
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View/Download:120/0
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Submit date:2016/11/23