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纳米投影光刻中的光栅检焦技术研究 学位论文
, 北京: 中国科学院研究生院, 2011
Authors:  陈旺富
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投影光刻  检焦技术  偏振调制  光弹调制  
Moire-based focusing and leveling scheme for optical projection lithography 期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 31, 页码: 5959-5963
Authors:  Yan, Wei;  Yang, Yong;  Chen, Wangfu;  Hu, Song;  Zhou, Shaolin
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Extended dual-grating alignment method for optical projection lithography 期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 4, 页码: 708-713
Authors:  Chen, Wangfu;  Yan, Wei;  Hu, Song;  Yang, Yong;  Zhou, Shaolin
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Moire-based focusing and leveling scheme for optical projection lithography 期刊论文
Applied Optics, 2010, 卷号: 49, 期号: 31
Authors:  Yan Wei;  Yang Yong;  Chen Wangfu;  Hu Song;  Zhou Shaolin;  Yan W (Yan Wei)
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Extended dual-grating alignment method for optical projection lithography 期刊论文
Applied Optics, 2010, 卷号: 49, 期号: 4, 页码: 708-713
Authors:  Wangfu Chen;  Wei Yan;  Song Hu;  Yong Yang;  Shaolin Zhou
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An optical modulation based focus method for optical projection lithography 会议论文
, 2010
Authors:  Wangfu Chen;  Song Hu
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基于矢量衍射理论的振幅型光子筛设计与分析 期刊论文
光电工程, 2010, 卷号: 37, 期号: 8, 页码: 122-126
Authors:  蒋文波;  胡松;  赵立新;  杨勇;  严伟;  周绍林;  陈旺富
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Fabrication of Nanoscale Line Width Using the Improved Optical Maskless Lithographic System 期刊论文
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2009, 卷号: 6, 期号: 5, 页码: 1170-1174
Authors:  Jiang, Wenbo;  Hu, Song;  Zhao, Lixin;  Yan, Wei;  Yang, Yong;  Zhou, Shaolin;  Chen, Wangfu
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Maskless Lithography  Key Techniques  Lithographic Experiment  Nanoscale  
Beam Splitter Achieved by Using Metallic Structure with Nanoslits 期刊论文
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2009, 卷号: 6, 期号: 5, 页码: 1030-1033
Authors:  Yang, Yong;  Fu, Yongqi;  Yao, Hanmin;  Hu, Song;  Zhou, Shaolin;  Yan, Wei;  Chen, Wangfu;  Cheng, Guanxiao;  Li, Zhan
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Beam Splitter  Metallic Nanoslit  Fdtd  
微悬臂梁阵列成像系统光学特性分析 期刊论文
四川大学学报, 2009, 卷号: 46, 期号: 4, 页码: 988-992
Authors:  严伟;  佟军民;  陈大鹏;  胡松;  赵立新;  杨勇[;  蒋文波;  周绍林;  陈旺富
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