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Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文
Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419
Authors:  Wang, Weimin;  Tao, Fenggang;  Wang, Qiang;  Qiu, Chuankai;  Chen, Zexiang;  Fan, Bin
Adobe PDF(1651Kb)  |  Favorite  |  View/Download:40/0  |  Submit date:2018/11/20
Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining  
Electrostatic repulsive out-of-plane actuator using conductive substrate 期刊论文
SCIENTIFIC REPORTS, 2016, 卷号: 6
Authors:  Wang, Weimin;  Wang, Qiang;  Ren, Hao;  Ma, Wenying;  Qiu, Chuankai;  Chen, Zexiang;  Fan, Bin
Adobe PDF(836Kb)  |  Favorite  |  View/Download:70/0  |  Submit date:2018/06/14
Adaptive Optics  Micromirror  Translation  Toolbox  Matlab  
Method for measuring the cone angle and the shape of the axicon simultaneously using computer-generated holograms 期刊论文
APPLIED OPTICS, 2015, 卷号: 54, 期号: 28, 页码: 8290-8292
Authors:  Chen, Qiang;  Zhang, Yonghong;  Qiu, Chuankai;  Wan, Yongjian;  Hou, Xi
Favorite  |  View/Download:127/0  |  Submit date:2015/12/04
Method for measuring the cone angle and the shape of the axicon simultaneously using computer-generated holograms 期刊论文
Applied Optics, 2015, 卷号: 54, 期号: 28, 页码: 8290-8292
Authors:  Chen, Qiang;  Zhang, Yonghong;  Qiu, Chuankai;  Wan, Yongjian;  Hou, Xi;  Zhang, Yonghong (zyhscu1989@126.com)
Adobe PDF(485Kb)  |  Favorite  |  View/Download:78/0  |  Submit date:2016/11/22
自组装静电驱动微机电系统倾斜镜(英文) 期刊论文
强激光与粒子束, 2015, 期号: 2, 页码: 146-150
Authors:  王强;  汪为民;  邱传凯;  于军胜
Adobe PDF(838Kb)  |  Favorite  |  View/Download:57/0  |  Submit date:2016/11/22
倾斜镜  微机电系统  静电驱动  自组装  
Resolution improvement of grating spectrometer by using a tunable Fabry-Perot filter 会议论文
, 2015
Authors:  Fang, Liang;  Shi, Zhendong;  Qiu, Chuankai;  Zhou, Chongxi
Adobe PDF(465Kb)  |  Favorite  |  View/Download:82/0  |  Submit date:2016/11/25
基于静电平行板驱动器的MEMS变形镜特性分析 期刊论文
半导体光电, 2015, 卷号: 36, 期号: 5, 页码: 704-707
Authors:  汪为民,王强,邱传凯等;  汪为民
Adobe PDF(1054Kb)  |  Favorite  |  View/Download:93/0  |  Submit date:2016/11/22
Mems  静电平行板驱动器  变形镜  弹性系数  
MEMS静电驱动器的场致电子发射效应研究 期刊论文
半导体光电, 2015, 卷号: 36, 期号: 6, 页码: 925-929+935
Authors:  汪为民,王强,邱传凯等;  汪为民
Adobe PDF(1062Kb)  |  Favorite  |  View/Download:80/0  |  Submit date:2016/11/22
Mems  静电驱动器  场致电子发射  场增强因子  名义发射面积  可靠性  
Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文
Microsystem Technologies, 2015
Authors:  Wang, Weimin;  Tao, Fenggang;  Wang, Qiang;  Qiu, Chuankai;  Chen, Zexiang;  Fan, Bin
Adobe PDF(1773Kb)  |  Favorite  |  View/Download:53/0  |  Submit date:2016/11/22
An electrostatically actuated MEMS tilting mirror based on self-assembly 期刊论文
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2015, 卷号: 27, 期号: 2, 页码: 024127
Authors:  Wang, Qiang;  Wang, Weimin;  Qiu, Chuankai;  Yu, Junsheng
Adobe PDF(7259Kb)  |  Favorite  |  View/Download:64/0  |  Submit date:2016/11/22