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中国科学院光电技术研究所机构知识库
Knowledge Management System Of Institute of optics and electronics, CAS
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基于EtherCAT架构的伺服系统谐振在线检测
期刊论文
信息技术与网络安全, 2018, 卷号: 37, 期号: 5, 页码: 102-105
Authors:
郭高洁
;
蒋平
;
李欣
;
钱俊璋
Adobe PDF(1023Kb)
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Submit date:2019/08/23
EtherCAT
谐振在线检测
伺服系统
互相关分析法
Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry
期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 8, 页码: 2301-2306
Authors:
Zhou, Yi
;
Tang, Yan
;
Zhu, Jiangping
;
Deng, Qinyuan
;
Yang, Yong
;
Zhao, Lixin
;
Hu, Song
Adobe PDF(1264Kb)
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Submit date:2018/11/20
Microstructure
Contrast enhancement of microsphere-assisted super-resolution imaging in dark-field microscopy
期刊论文
APPLIED PHYSICS EXPRESS, 2017, 卷号: 10, 期号: 8
Authors:
Zhou, Yi
;
Tang, Yan
;
Deng, Qinyuan
;
Zhao, Lixin
;
Hu, Song
Adobe PDF(987Kb)
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Submit date:2018/11/20
SOLID IMMERSION LENS
RESOLUTION
NANOSCOPE
SINGLE
Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry
会议论文
0277-786X
Authors:
Zhou, Yi
;
Tang, Yan
;
Deng, Qinyuan
;
Zhao, Lixin
;
Hu, Song
Adobe PDF(606Kb)
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Submit date:2018/12/20
Microstructure - Modulation - Surface topography - Units of measurement
白光干涉检测仪垂直扫描系统设计
期刊论文
半导体技术, 2017, 卷号: 42, 期号: 3, 页码: 229-234
Authors:
姚靖威
;
唐燕
;
周毅
;
邓茜
;
赵立新
;
胡松
Adobe PDF(1292Kb)
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Submit date:2018/12/20
Quadratic grating apodized photon sieves for simultaneous multiplane microscopy
期刊论文
Optics and Lasers in Engineering, 2017, 卷号: 97, 页码: 1339-1351
Authors:
Cheng, Yiguang
;
Zhu, Jiangping
;
He, Yu
;
Tang, Yan
;
Hu, Song
;
Zhao, Lixin
Adobe PDF(3532Kb)
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Submit date:2018/11/20
Diffractive optics - Light - Optical transfer function - Photons - X ray microscopes
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes
期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
Authors:
Zhou, Yi
;
Tang, Yan
;
Deng, Qinyuan
;
Liu, Junbo
;
Wang, Jian
;
Zhao, Lixin
Adobe PDF(2592Kb)
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Submit date:2018/11/20
Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement
Focusing Properties of Single-Focus Photon Sieve
期刊论文
IEEE Photonics Technology Letters, 2017, 卷号: 29, 期号: 3, 页码: 275-278
Authors:
Cheng, Yiguang
;
Zhu, Jiangping
;
Hu, Song
;
Zhao, Lixin
;
Yan, Wei
;
He, Yu
;
Jiang, Weibo
;
Liu, Junbo
Adobe PDF(1197Kb)
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Submit date:2018/11/20
Diffractive optics - Focusing - Photons - Sieves
High precision locating control system based on VCM for Talbot lithography
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
Authors:
Yao, Jingwei
;
Zhao, Lixin
;
Deng, Qian
;
Hu, Song
Adobe PDF(501Kb)
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Submit date:2018/06/14
Control Systems
Digital Signal Processors
Efficiency
Feedback
Lithography
Manufacture
Materials Testing
Optical Devices
Signal Processing
Structural Design
Three Term Control Systems
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:
Deng, Qian
;
Liu, Junbo
;
Zhou, Shaolin
;
Tang, Yan
;
Zhao, Lixin
;
Hu, Song
;
Chen, Yinghong
Adobe PDF(527Kb)
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Submit date:2018/06/14
Crystal Symmetry
Frequency Doublers
Lithography
Manufacture
Microoptics
Optical Devices
Phase Shift
Ultraviolet Spectroscopy