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基于散射光暗场显微的基片表面颗粒检测方法研究 学位论文
, 中国科学院光电技术研究所: 中国科学院大学, 2019
Authors:  艾立夫
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Simple and rapid particle detection device for substrate surface 会议论文
Proceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS, Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
Authors:  Ai, Lifu;  Zhang, Jian;  Wang, Changtao;  Luo, Xiangang
Adobe PDF(2118Kb)  |  Favorite  |  View/Download:16/0  |  Submit date:2019/08/23
Substrate detection  lithography  image processing  light scattering