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中国科学院光电技术研究所机构知识库
Knowledge Management System Of Institute of optics and electronics, CAS
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光刻机 信息时代的制造之王
期刊论文
百科知识, 2020, 期号: 32, 页码: 4-9
Authors:
唐燕
;
胡松
;
何渝
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Submit date:2021/05/11
光刻机
芯片制造
Measurement of Wafer Focus by Grating Shearing Interferometry
期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10217467-1-8
Authors:
Wang, Jian
;
Hu, Song
;
Zhu, Xianchang
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Focusing
Grating
Shearing Interferometry
Lithography
Coated hihg-refractive-index Barium Titanate Glass Microspheres for optically Trapped Microsphere Super-resolution Microscopy:A Simulation Study
期刊论文
MDPI Photonics, 2020, 卷号: 7, 期号: 4, 页码: 84
Authors:
Liu, Xi
;
Hu,Song
;
Tang Yan
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Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope
期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10176110-1-12
Authors:
Jin, Chuan
;
He, Yu
;
Tang, Yan
;
Xie, Zhongye
;
Zhao, Lixin
;
Hu, Song
Adobe PDF(4473Kb)
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Multi-angle Stitching
Digital Holography Microscope
Large Gradient Micro-structure
Topography Measurement
Quick image stitching algorithm based on template matching for Mask defect detection
会议论文
Journal of Physics: Conference Series, Chongqing, China, January 18, 2020 - January 19, 2020
Authors:
Wei, Hongbin
;
Hu, Song
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Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy
期刊论文
IEEE Photonics Technology Letters, 2020, 卷号: 32, 期号: 9, 页码: 522-525
Authors:
Wei, Haojie
;
Hu, Song
;
Tang, Yan
;
Xie, Zhongye
;
Liu, Xi
;
He, Yu
;
Liu, Junbo
Adobe PDF(1488Kb)
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Selecting a Proper Microsphere to Combine Optical Trapping with Microsphere-Assisted Microscopy
期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10093127-1-11
Authors:
Liu, Xi
;
Hu, Song
;
Tang, Yan
;
Xie, Zhongye
;
Liu, Junbo
;
He, Yu
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Optical Trapping
Super-resolution Microscopy
Microsphere
Photonic Nanojet
Intensity modulation based optical proximity optimization for the maskless lithography
期刊论文
OPTICS EXPRESS, 2020, 卷号: 28, 期号: 1, 页码: 548-557
Authors:
Liu, Jianghui
;
Liu, Junbo
;
Deng, Qingyuan
;
Feng, Jinhua
;
Zhou, Shaolin
;
Hu, Song
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3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy
期刊论文
IEEE Photonics Technology Letters, 2019, 卷号: 31, 期号: 22, 页码: 1783-1786
Authors:
Xie, Zhongye
;
Hu, Song
;
Tang, Yan
;
Liu, Xi
;
Liu, Junbo
;
He, Yu
Adobe PDF(1249Kb)
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Submit date:2021/05/06
Microscopy
surface topography
microsphere
Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique
期刊论文
Applied Optics, 2019, 卷号: 58, 期号: 30, 页码: 8180-8186
Authors:
Liu, Lei
;
Tang, Yan
;
Xie, Zhongye
;
Feng, Jinhua
;
He, Yu
;
Hu, Song
Adobe PDF(3128Kb)
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Submit date:2021/05/06