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Research of communication mechanism based USB in wafer stage of lithography 会议论文
, 2012
Authors:  Sheng, Zhuang;  Tang, Xiaoping;  Li, Jinlong;  Sheng, Z. (szz0000@126.com)
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基于模糊PID的光刻机同步扫描控制 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 9, 页码: 591-595+605
Authors:  盛壮;  唐小萍;  胡松;  李兰兰;  谢飞;  李金龙;  徐锋
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