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Influence of tilt moire fringe on alignment accuracy in proximity lithography 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2013, 卷号: 51, 期号: 4, 页码: 371-381
Authors:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan;  Xu, Feng;  He, Yu;  Zhou, Shaolin;  Li, Lanlan
Favorite  |  View/Download:111/0  |  Submit date:2015/04/17
Angular Displacement  Phase  Tilt Moire Fringe  Lithography Alignment  Linear Displacement  
Four-quadrant gratings moire fringe alignment measurement in proximity lithography 期刊论文
OPTICS EXPRESS, 2013, 卷号: 21, 期号: 3, 页码: 3463-3473
Authors:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng.;  Zhou, Shaolin;  Tang, Yan;  Zhong, Min;  Zhao, Lixin;  Chen, Minyong;  Li, Lanlan;  He, Yu;  Jiang, Wei
Favorite  |  View/Download:119/0  |  Submit date:2015/04/17
A new synchronization control method of wafer and reticle stage in step and scan lithographic equipment 期刊论文
Optik, 2013, 卷号: 124, 期号: 24, 页码: 6861-6865
Authors:  Li, Lanlan;  Hu, Song;  Zhao, Lixin;  Ma, Ping;  Li, Jinlong;  Zhong, Lingna;  Li, L. (lilanlan1022@qq.com)
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Four-quadrant gratings moiré fringe alignment measurement in proximity lithography 期刊论文
Optics Express, 2013, 卷号: 21, 期号: 3, 页码: 3463-3473
Authors:  Zhu, Jiangping;  Hu, Song;  Yu, JunshenG.;  Zhou, Shaolin;  Tang, Yan;  Zhong, Min;  Zhao, Lixin;  Chen, Minyong;  Li, Lanlan;  He, Yu;  Jiang, Wei;  Zhu, J.
Adobe PDF(2051Kb)  |  Favorite  |  View/Download:44/0  |  Submit date:2016/11/23
Influence of tilt moiré fringe on alignment accuracy in proximity lithography 期刊论文
Optics and Lasers in Engineering, 2013, 卷号: 51, 期号: 4, 页码: 371-381
Authors:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan;  Xu, Feng;  He, Yu;  Zhou, Shaolin;  Li, Lanlan;  Zhu, J. (zsyioe@163.com)
Adobe PDF(2655Kb)  |  Favorite  |  View/Download:51/0  |  Submit date:2016/11/23
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
Optik, 2013, 卷号: 124, 期号: 9, 页码: 818-823
Authors:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan;  Xu, F. (casxufeng@gmail.com)
Adobe PDF(825Kb)  |  Favorite  |  View/Download:40/0  |  Submit date:2016/11/23
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 9, 页码: 818-823
Authors:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
Favorite  |  View/Download:75/0  |  Submit date:2015/04/17
Alignment  Closed Fringe  Phase Demodulation  2-d Wavelet Ridge  
A new synchronization control method of wafer and reticle stage in step and scan lithographic equipment 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 24, 页码: 6861-6865
Authors:  Li, Lanlan;  Hu, Song;  Zhao, Lixin;  Ma, Ping;  Li, Jinlong;  Zhong, Lingna
Favorite  |  View/Download:83/0  |  Submit date:2015/04/17
Scanner  Synchronization Error  Tracking Error  Phase Difference  
基于模糊PID的光刻机同步扫描控制 期刊论文
微纳电子技术, 2011, 卷号: 48, 期号: 9, 页码: 591-595+605
Authors:  盛壮;  唐小萍;  胡松;  李兰兰;  谢飞;  李金龙;  徐锋
Adobe PDF(1111Kb)  |  Favorite  |  View/Download:36/0  |  Submit date:2016/11/23