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中国科学院光电技术研究所机构知识库
Knowledge Management System Of Institute of optics and electronics, CAS
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Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters
期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
Authors:
Zhou, Shaolin
;
Liu, Junbo
;
Deng, Qian
;
Xie, Changqing
;
Chan, Mansun
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View/Download:98/0
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Submit date:2016/10/27
Diffraction
Photolithography
Terahertz Filters
Hexagonal Array
The Anomaly of Periodicity Doubling in Projection Photolithography of Periodic Features
期刊论文
IEEE Photonics Technology Letters, 2016, 卷号: 28, 期号: 22, 页码: 2529-2532
Authors:
Liu, Junbo
;
Zhou, Shaolin
;
Yang, Yong
;
Hu, Song
;
He, Yu
;
Chen, Yinghong
Adobe PDF(955Kb)
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View/Download:75/0
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Submit date:2018/06/14
Diffraction
Frequency Doublers
Light Polarization
Phase Shift
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:
Deng, Qian
;
Liu, Junbo
;
Zhou, Shaolin
;
Tang, Yan
;
Zhao, Lixin
;
Hu, Song
;
Chen, Yinghong
Adobe PDF(527Kb)
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View/Download:78/0
  |  
Submit date:2018/06/14
Crystal Symmetry
Frequency Doublers
Lithography
Manufacture
Microoptics
Optical Devices
Phase Shift
Ultraviolet Spectroscopy
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF
期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:
Liu, Junbo
;
Zhou, Shaolin
;
Hu, Song
;
Gao, Hongtao
;
He, Yu
;
Cheng, Yiguang
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View/Download:112/0
  |  
Submit date:2015/12/04
Diffraction
Depth-of-focus
Talbot Lithography
Microfabrication
Moire fringe alignment using composite circular-line gratings for proximity lithography
期刊论文
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:
Xu, Feng
;
Zhou, Shaolin
;
Hu, Song
;
Jiang, Wenbo
;
Luo, Liang
;
Chu, Hongyu
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View/Download:96/0
  |  
Submit date:2015/12/04
Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process
期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
Authors:
Zhou, Shaolin
;
Yang, Yong
;
Hu, Song
;
Xu, Xiangmin
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View/Download:79/0
  |  
Submit date:2015/12/04
Diffraction And Gratings
Micro/nanofabrication
Phase Modulation
Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process
期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 4, 页码: 4900111
Authors:
Zhou, Shaolin
;
Yang, Yong
;
Hu, Song
;
Xu, Xiangmin
;
Zhou, Shaolin (shaolinzhou@gmail.com)
Adobe PDF(920Kb)
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View/Download:68/0
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Submit date:2016/11/23
Moiré fringe alignment using composite circular-line gratings for proximity lithography
期刊论文
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:
Xu, Feng
;
Zhou, Shaolin
;
Hu, Song
;
Jiang, Wenbo
;
Luo, Liang
;
Chu, Hongyu
Adobe PDF(1995Kb)
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View/Download:54/0
  |  
Submit date:2016/11/23
Spectrum-Integral Talbot Effect for UV Photolithography with Extended DOF
期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:
Liu, Junbo
;
Zhou, Shaolin
;
Hu, Song
;
Gao, Hongtao
;
He, Yu
;
Cheng, Yiguang
Adobe PDF(1408Kb)
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View/Download:77/0
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Submit date:2016/11/23
Moire interferometry with high alignment resolution in proximity lithographic process
期刊论文
APPLIED OPTICS, 2014, 卷号: 53, 期号: 5, 页码: 951-959
Authors:
Zhou, Shaolin
;
Hu, Song
;
Fu, Yongqi
;
Xu, Xiangmin
;
Yang, Jun
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View/Download:111/0
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Submit date:2015/07/10