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A new flexible hybrid mask for contact exposure and its fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q
Authors:  Liu, Xin;  Zhang, Man;  Cao, A-Xiu;  Pang, Hui;  Wang, Jia-Zhou;  Deng, Qi-Ling
Adobe PDF(345Kb)  |  Favorite  |  View/Download:54/0  |  Submit date:2018/06/14
Elastic Moduli  Fabrication  Lithography  Manufacture  Nanostructures  Optical Devices  Photolithography  Photoresists  Polymers  Printing  
Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene 期刊论文
Journal of Nanoscience and Nanotechnology, 2016, 卷号: 16, 期号: 12, 页码: 12316-12320
Authors:  Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Pang, Hui;  Cao, Axiu;  Hu, Song
Adobe PDF(489Kb)  |  Favorite  |  View/Download:31/0  |  Submit date:2018/06/14
Curing  Fabrication  Microchannels  Molds  Nanoimprint Lithography  Nanostructures  Pulse Width Modulation  Substrates  Synthesis (Chemical)