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Influence of deposition parameters on residual stress of YbF3 thin film 期刊论文
Proceedings of SPIE: Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 2016, 卷号: 9796, 页码: 97960N
Authors:  Zhang, Yao-Ping;  Fan, Jun-Qi;  Long, Guo-Yun
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Adaptive Optics  Coatings  Deposition  Ion Beam Assisted depositIon  Monocrystalline Silicon  Reflective Coatings  Refractive Index  Residual Stresses  Space Debris  Sputtering