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Wavefront-aberration measurement and systematic-error analysis of a high numerical-aperture objective 期刊论文
Optical Engineering, 2018, 卷号: 57, 期号: 2, 页码: 024107
Authors:  Liu, Zhixiang;  Xing, Tingwen;  Jiang, Yadong;  Lv, Baobin
Adobe PDF(3060Kb)  |  Favorite  |  View/Download:31/0  |  Submit date:2019/08/23
Diffraction  Diffraction gratings  Interferometers  Ray tracing  Shearing  Systematic errors  Wavefronts  
Quasi-Talbot effect of orbital angular momentum beams for generation of optical vortex arrays by multiplexing metasurface design 期刊论文
NANOSCALE, 2018, 卷号: 10, 期号: 2, 页码: 666-671
Authors:  Gao, Hui;  Li, Yang;  Chen, Lianwei;  Jin, Jinjin;  Pu, Mingbo;  Li, Xiong;  Gao, Ping;  Wang, Changtao;  Luo, Xiangang;  Hong, Minghui
Adobe PDF(1309Kb)  |  Favorite  |  View/Download:27/0  |  Submit date:2019/08/23
Angular momentum  Contour measurement  Diffraction gratings  Numerical methods  
Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
Authors:  Zhou, Shaolin;  Liu, Junbo;  Deng, Qian;  Xie, Changqing;  Chan, Mansun
Favorite  |  View/Download:93/0  |  Submit date:2016/10/27
Diffraction  Photolithography  Terahertz Filters  Hexagonal Array  
High precision locating control system based on VCM for Talbot lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
Authors:  Yao, Jingwei;  Zhao, Lixin;  Deng, Qian;  Hu, Song
Adobe PDF(501Kb)  |  Favorite  |  View/Download:50/0  |  Submit date:2018/06/14
Control Systems  Digital Signal Processors  Efficiency  Feedback  Lithography  Manufacture  Materials Testing  Optical Devices  Signal Processing  Structural Design  Three Term Control Systems  
The Anomaly of Periodicity Doubling in Projection Photolithography of Periodic Features 期刊论文
IEEE Photonics Technology Letters, 2016, 卷号: 28, 期号: 22, 页码: 2529-2532
Authors:  Liu, Junbo;  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  He, Yu;  Chen, Yinghong
Adobe PDF(955Kb)  |  Favorite  |  View/Download:69/0  |  Submit date:2018/06/14
Diffraction  Frequency Doublers  Light Polarization  Phase Shift  
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin;  Hu, Song;  Chen, Yinghong
Adobe PDF(527Kb)  |  Favorite  |  View/Download:73/0  |  Submit date:2018/06/14
Crystal Symmetry  Frequency Doublers  Lithography  Manufacture  Microoptics  Optical Devices  Phase Shift  Ultraviolet Spectroscopy  
Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 6
Authors:  Zhou, Yi;  Zhu, Jiangping;  Deng, Qinyuan;  Liu, Junbo;  Si, Xinchun;  Hu, Song
Favorite  |  View/Download:161/0  |  Submit date:2016/02/03
Moire Fringes  Magnification  Grating Marks  Phase Analysis  
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu;  Cheng, Yiguang
Favorite  |  View/Download:106/0  |  Submit date:2015/12/04
Diffraction  Depth-of-focus  Talbot Lithography  Microfabrication  
Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
Authors:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
Favorite  |  View/Download:76/0  |  Submit date:2015/12/04
Diffraction And Gratings  Micro/nanofabrication  Phase Modulation  
Spectrum-Integral Talbot Effect for UV Photolithography with Extended DOF 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu;  Cheng, Yiguang
Adobe PDF(1408Kb)  |  Favorite  |  View/Download:72/0  |  Submit date:2016/11/23