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Wavefront-aberration measurement and systematic-error analysis of a high numerical-aperture objective 期刊论文
Optical Engineering, 2018, 卷号: 57, 期号: 2, 页码: 024107
Authors:  Liu, Zhixiang;  Xing, Tingwen;  Jiang, Yadong;  Lv, Baobin
Adobe PDF(3060Kb)  |  Favorite  |  View/Download:31/0  |  Submit date:2019/08/23
Diffraction  Diffraction gratings  Interferometers  Ray tracing  Shearing  Systematic errors  Wavefronts  
Experimental study of Talbot imaging moire-based lithography alignment method 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2014, 卷号: 58, 页码: 54-59
Authors:  Zhu, Jiangping;  Hu, Song;  Zhou, Pei;  Yu, Junsheng
Favorite  |  View/Download:96/0  |  Submit date:2015/07/10
Alignment  Moire Techniques  Gratings  Talbot And Self-imaging Effects  
基于哈特曼波前探测的流场计算机层析重建系统 学位论文
, 光电技术研究所: 中国科学院光电技术研究所, 2005
Authors:  戴云
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光学计算层析  夏克-哈特曼传感器  流场  层析重建