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Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography 期刊论文
Advanced Optical Materials, 2017, 卷号: 5, 期号: 21, 页码: 1700429
Authors:  Liu, Liqin;  Zhang, Xiaohu;  Zhao, Zeyu;  Pu, Mingbo;  Gao, Ping;  Luo, Yunfei;  Jin, Jinjin;  Wang, Changtao;  Luo, Xiangang
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Electric fields - Electron beam lithography - Fabrication - Holography - Ion beams - Lithography - Masks - Nanostructures - Photoresists - Plasmons  
Proximity correction and resolution enhancement of plasmonic lens lithography far beyond the near field diffraction limit 期刊论文
RSC Advances, 2017, 卷号: 7, 期号: 20, 页码: 12366-12373
Authors:  Luo, Yunfei;  Liu, Ling;  Zhang, Wei;  Kong, Weijie;  Zhao, Chengwei;  Gao, Ping;  Zhao, Zeyu;  Pu, Mingbo;  Wang, Changtao;  Luo, Xiangang
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Plasmons - Scanning probe microscopy  
Subdiffraction plasmonic lens lithography prototype in stepper mode 期刊论文
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 2017, 卷号: 35, 期号: 1, 页码: 011603
Authors:  Liu, Minggang;  Zhao, Chengwei;  Luo, Yunfei;  Zhao, Zeyu;  Wang, Yanqin;  Gao, Ping;  Wang, Changtao;  Luo, Xiangang
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Lenses - Lithography - Metal working - Photolithography - Photoresists  
Amplification of surface-enhanced Raman scattering due to substrate-mediated localized surface plasmons in gold nanodimers 期刊论文
JOURNAL OF MATERIALS CHEMISTRY C, 2017, 卷号: 5, 期号: 16, 页码: 4075-4084
Authors:  Yue, Weisheng;  Wang, Zhihong;  Whittaker, John;  Lopez-royo, Francisco;  Yang, Yang;  Zayats, Anatoly V.
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SPECTROSCOPY  NANOPARTICLES  RESONANCE  ARRAYS  FILMS  ASSEMBLIES  NANOHOLE  ANTENNAS  SIZE  NM  
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
Authors:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin;  Hu, Song;  Chen, Yinghong
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Crystal Symmetry  Frequency Doublers  Lithography  Manufacture  Microoptics  Optical Devices  Phase Shift  Ultraviolet Spectroscopy  
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
Authors:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu;  Cheng, Yiguang
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Diffraction  Depth-of-focus  Talbot Lithography  Microfabrication  
Moire fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
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Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
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Proximity Lithography  Mask-wafer Alignment  Phase Analysis  Spatial Frequency  
Moiré fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
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Gap-optimized Moiré phase imaging alignment for proximity lithography 期刊论文
Optical Engineering, 2015, 卷号: 54, 期号: 1, 页码: 17105
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
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