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基于光场成像原理的微纳结构检测方法研究 学位论文
博士, 中国科学院光电技术研究所: 中国科学院大学光电技术研究所, 2019
Authors:  杨帆
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光场成像  微透镜阵列  深度提取  微纳结构  干涉成像  
An Ultrabroadband THz Absorber Based on Structured Doped Silicon With Antireflection Techniques 期刊论文
IEEE PHOTONICS JOURNAL, 2018, 卷号: 10, 期号: 6, 页码: 5901010
Authors:  Yuan, Jing;  Luo, Jun;  Zhang, Ming;  Pu, Mingbo;  Li, Xiong;  Zhao, Zeyu;  Luo, Xiangang
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Ultra-broadband  terahertz absorber  antireflection techniques  
Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography 期刊论文
Advanced Optical Materials, 2017, 卷号: 5, 期号: 21, 页码: 1700429
Authors:  Liu, Liqin;  Zhang, Xiaohu;  Zhao, Zeyu;  Pu, Mingbo;  Gao, Ping;  Luo, Yunfei;  Jin, Jinjin;  Wang, Changtao;  Luo, Xiangang
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Electric fields - Electron beam lithography - Fabrication - Holography - Ion beams - Lithography - Masks - Nanostructures - Photoresists - Plasmons  
Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography 期刊论文
Micromachines, 2017, 卷号: 8, 期号: 10, 页码: 314
Authors:  Deng, Qinyuan;  Yang, Yong;  Gao, Hongtao;  Zhou, Yi;  He, Yu;  Hu, Song
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Cost effectiveness - Lithography - Microoptics - Photoresists  
Subdiffraction plasmonic lens lithography prototype in stepper mode 期刊论文
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 2017, 卷号: 35, 期号: 1, 页码: 011603
Authors:  Liu, Minggang;  Zhao, Chengwei;  Luo, Yunfei;  Zhao, Zeyu;  Wang, Yanqin;  Gao, Ping;  Wang, Changtao;  Luo, Xiangang
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Lenses - Lithography - Metal working - Photolithography - Photoresists  
A new flexible hybrid mask for contact exposure and its fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q
Authors:  Liu, Xin;  Zhang, Man;  Cao, A-Xiu;  Pang, Hui;  Wang, Jia-Zhou;  Deng, Qi-Ling
Adobe PDF(345Kb)  |  Favorite  |  View/Download:84/0  |  Submit date:2018/06/14
Elastic Moduli  Fabrication  Lithography  Manufacture  Nanostructures  Optical Devices  Photolithography  Photoresists  Polymers  Printing  
Superresolution nanolithography technique based on polydimethylsiloxane soft mold 期刊论文
IEEE International Conference: 2016 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M-NANO), 2016, 页码: 269-272
Authors:  He, Chuanwang;  Dong, Xiaochun;  Wang, Pinghe
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Electric Fields  Linewidth  Manufacture  Microchannels  Molds  Nanolithography  Nanotechnology  Optical Resolving Power  Photoresists  Pulse Width Modulation  Silver  
3D micro-concrete hybrid structures fabricated by femtosecond laser two-photon polymerization for biomedical and photonic applications 期刊论文
Proceedings of the IEEE: 2016 IEEE International Conference on Industrial Technology, ICIT 2016, 2016, 卷号: 2016-May, 页码: 1108-1114
Authors:  Zheren, Du;  Lianwei, Chen;  Dacheng, Wang;  Zuyong, Wang;  Teck, Lim Chwee;  Minghui, Hong;  Yang, Li;  Xiong, Li;  Xiangang, Luo;  Fang, Kong;  Ming, Dao;  Yu, Cao;  Fengping, Li
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3d Printers  Biomedical Equipment  Concretes  Efficiency  Optical Properties  Photons  Photoresists  Polymerization  Printing  
Influence of sphere-surface distance and exposure dose on resolution of sphere-lens-Array lithography 期刊论文
Optics Express, 2015, 卷号: 23, 期号: 23, 页码: 30136-30142
Authors:  Liu, Xianchao;  Li, Xiong;  Li, Ling;  Chen, Weidong;  Luo, Xiangang
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Nanochannel fabrication by imprinting-induced cracks 期刊论文
Applied Physics Letters, 2014, 卷号: 104, 期号: 7, 页码: 073104
Authors:  Xia, Liangping;  Zhang, Man;  Yang, Zheng;  Cui, Hongliang;  Yin, Shaoyun;  Hu, Song;  Du, Chunlei;  Du, C. (cldu@cigit.ac.cn)
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