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Properties of dynamic image displacements based on microstructure 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 28, 页码: 8187-8192
Authors:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
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Molecular physics  Optics  
Analysis of the Subdivision Errors of Photoelectric Angle Encoders and Improvement of the Tracking Precision of a Telescope Control System 期刊论文
SENSORS, 2018, 卷号: 18, 期号: 9, 页码: 2998
Authors:  Yu, Jiawei;  Wang, Qiang;  Zhou, Guozhong;  He, Dong;  Xia, Yunxia;  Liu, Xiang;  Lv, Wenyi;  Huang, Yongmei
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telescope control systems  photoelectric angle encoders  tracking precision  subdivision errors  amplitude error  real-time compensation  
Dynamic patterns based on the superposition of micropattern array and microlens array 期刊论文
OPTIK, 2018, 卷号: 174, 页码: 244-251
Authors:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
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Moire techniques  Dynamic  Microlens Array  Pattern  
Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation 会议论文
Proceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS, Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
Authors:  Yang Kejun;  Tang Yan;  Hu Song;  Chen Chuyi
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Super-resolution imaging  image reconstruction  structured illumination  optical measurement  micro-nano structure  phase shifting  
Pushing the plasmonic imaging nanolithography to nano-manufacturing 期刊论文
Optics Communications, 2017, 卷号: 404, 页码: 62-72
Authors:  Gao, Ping;  Li, Xiong;  Zhao, Zeyu;  Ma, Xiaoliang;  Pu, Mingbo;  Wang, Changtao;  Luo, Xiangang
Adobe PDF(3875Kb)  |  Favorite  |  View/Download:53/0  |  Submit date:2018/11/20
Diffraction - Electromagnetic waves - Lithography - Nanolithography - Photolithography - Surface plasmon resonance  
Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
Authors:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
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Diffraction And Gratings  Micro/nanofabrication  Phase Modulation  
Gap-optimized Moire phase imaging alignment for proximity lithography 期刊论文
OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
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Lithography  Alignment  Moire Techniques  
Experimental study of Talbot imaging moire-based lithography alignment method 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2014, 卷号: 58, 页码: 54-59
Authors:  Zhu, Jiangping;  Hu, Song;  Zhou, Pei;  Yu, Junsheng
Favorite  |  View/Download:96/0  |  Submit date:2015/07/10
Alignment  Moire Techniques  Gratings  Talbot And Self-imaging Effects  
基于光栅调制相位成像的纳米对准方法研究 学位论文
, 北京: 中国科学院研究生院, 2011
Authors:  周绍林
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光学加工  光刻  对准  衍射光栅  相位成像  
Moire-based focusing and leveling scheme for optical projection lithography 期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 31, 页码: 5959-5963
Authors:  Yan, Wei;  Yang, Yong;  Chen, Wangfu;  Hu, Song;  Zhou, Shaolin
Favorite  |  View/Download:70/0  |  Submit date:2015/09/21