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基于单衍射元件的径向剪切干涉技术研究 学位论文
工学博士, 中国科学院光电技术研究所: 中国科学院大学, 2019
Authors:  王忠宇
Adobe PDF(7133Kb)  |  Favorite  |  View/Download:53/1  |  Submit date:2019/06/02
波前探测  径向剪切干涉仪  菲涅尔波带片  余弦波带片  
Properties of dynamic image displacements based on microstructure 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 28, 页码: 8187-8192
Authors:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
Adobe PDF(1197Kb)  |  Favorite  |  View/Download:46/0  |  Submit date:2019/08/23
Molecular physics  Optics  
Dynamic patterns based on the superposition of micropattern array and microlens array 期刊论文
OPTIK, 2018, 卷号: 174, 页码: 244-251
Authors:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
Adobe PDF(3050Kb)  |  Favorite  |  View/Download:31/0  |  Submit date:2019/08/23
Moire techniques  Dynamic  Microlens Array  Pattern  
Pushing the plasmonic imaging nanolithography to nano-manufacturing 期刊论文
Optics Communications, 2017, 卷号: 404, 页码: 62-72
Authors:  Gao, Ping;  Li, Xiong;  Zhao, Zeyu;  Ma, Xiaoliang;  Pu, Mingbo;  Wang, Changtao;  Luo, Xiangang
Adobe PDF(3875Kb)  |  Favorite  |  View/Download:53/0  |  Submit date:2018/11/20
Diffraction - Electromagnetic waves - Lithography - Nanolithography - Photolithography - Surface plasmon resonance  
Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 6
Authors:  Zhou, Yi;  Zhu, Jiangping;  Deng, Qinyuan;  Liu, Junbo;  Si, Xinchun;  Hu, Song
Favorite  |  View/Download:161/0  |  Submit date:2016/02/03
Moire Fringes  Magnification  Grating Marks  Phase Analysis  
Moire-Based Absolute Interferometry With Large Measurement Range in Wafer-Mask Alignment 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
Favorite  |  View/Download:87/0  |  Submit date:2015/07/10
Moire Fringes  Measurement Range  Wafer-mask Alignment  Lithography  
Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
Favorite  |  View/Download:97/0  |  Submit date:2015/07/10
Proximity Lithography  Mask-wafer Alignment  Phase Analysis  Spatial Frequency  
Gap-optimized Moire phase imaging alignment for proximity lithography 期刊论文
OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
Favorite  |  View/Download:112/0  |  Submit date:2015/07/10
Lithography  Alignment  Moire Techniques  
A Moire-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography 期刊论文
IEEE PHOTONICS JOURNAL, 2014, 卷号: 6, 期号: 4
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Li, Yanli;  Yin, Didi;  Tang, Yan;  Tong, Junmin
Favorite  |  View/Download:101/0  |  Submit date:2015/07/10
Moire Fringes  Focusing And Leveling  Fringe Analysis  Lithography  
Experimental study of Talbot imaging moire-based lithography alignment method 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2014, 卷号: 58, 页码: 54-59
Authors:  Zhu, Jiangping;  Hu, Song;  Zhou, Pei;  Yu, Junsheng
Favorite  |  View/Download:95/0  |  Submit date:2015/07/10
Alignment  Moire Techniques  Gratings  Talbot And Self-imaging Effects