IOE OpenIR

Browse/Search Results:  1-10 of 36 Help

Selected(0)Clear Items/Page:    Sort:
Engineering Optics 2.0: A Revolution in Optical Materials, Devices, and Systems 期刊论文
ACS PHOTONICS, 2018, 卷号: 5, 期号: 12, 页码: 4724-4738
Authors:  Luo, Xiangang
Adobe PDF(4720Kb)  |  Favorite  |  View/Download:48/0  |  Submit date:2019/08/23
engineering optics  subwavelength structures  diffraction  plasmonics  metamaterials  catenary optics  
Pushing the plasmonic imaging nanolithography to nano-manufacturing 期刊论文
Optics Communications, 2017, 卷号: 404, 页码: 62-72
Authors:  Gao, Ping;  Li, Xiong;  Zhao, Zeyu;  Ma, Xiaoliang;  Pu, Mingbo;  Wang, Changtao;  Luo, Xiangang
Adobe PDF(3875Kb)  |  Favorite  |  View/Download:53/0  |  Submit date:2018/11/20
Diffraction - Electromagnetic waves - Lithography - Nanolithography - Photolithography - Surface plasmon resonance  
Moire fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
Favorite  |  View/Download:91/0  |  Submit date:2015/12/04
Moire-Based Absolute Interferometry With Large Measurement Range in Wafer-Mask Alignment 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
Favorite  |  View/Download:87/0  |  Submit date:2015/07/10
Moire Fringes  Measurement Range  Wafer-mask Alignment  Lithography  
Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
Favorite  |  View/Download:97/0  |  Submit date:2015/07/10
Proximity Lithography  Mask-wafer Alignment  Phase Analysis  Spatial Frequency  
Moiré fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
Authors:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang;  Chu, Hongyu
Adobe PDF(1995Kb)  |  Favorite  |  View/Download:50/0  |  Submit date:2016/11/23
Gap-optimized Moiré phase imaging alignment for proximity lithography 期刊论文
Optical Engineering, 2015, 卷号: 54, 期号: 1, 页码: 17105
Authors:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu
Adobe PDF(2045Kb)  |  Favorite  |  View/Download:59/0  |  Submit date:2016/11/23
Moiré-based absolute interferometry with large measurement range in wafer-mask alignment 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4, 页码: 435-438
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
Adobe PDF(882Kb)  |  Favorite  |  View/Download:60/0  |  Submit date:2016/11/23
Adjustment strategy for inclination moiré fringes in lithography by spatial frequency decomposition 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4
Authors:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng
Adobe PDF(718Kb)  |  Favorite  |  View/Download:46/0  |  Submit date:2016/11/23
Moiré-based absolute interferometry with large measurement range in wafer-mask alignment 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4, 页码: 435-438
Authors:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
Adobe PDF(882Kb)  |  Favorite  |  View/Download:72/0  |  Submit date:2016/11/22