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高NA光学系统偏振像差研究 学位论文
, 中国科学院光电技术研究所: 中国科学院大学, 2019
Authors:  李杰
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Surface plasmons superresolution nanolithography technique by using polydimethylsiloxane soft mold based on light coupling 期刊论文
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2018, 卷号: 82, 期号: 3, 页码: 30401
Authors:  He, Chuanwang;  Huang, Peng;  Fan, Bin;  Dong, Xiaochun
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Electric fields  High frequency amplifiers  Microchannels  Molds  Nanolithography  Optical resolving power  Polydimethylsiloxane  Silver  Surface plasmons  
Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons 期刊论文
OPTICAL MATERIALS EXPRESS, 2018, 卷号: 8, 期号: 2, 页码: 199-209
Authors:  Liu, Hongchao;  Luo, Yunfei;  Kong, Weijie;  Liu, Kaipeng;  Du, Wenjuan;  Zhao, Chengwei;  Gao, Ping;  Zhao, Zeyu;  Wang, Changtao;  Pu, Mingbo;  Luo, Xiangang
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Wavefront-aberration measurement and systematic-error analysis of a high numerical-aperture objective 期刊论文
Optical Engineering, 2018, 卷号: 57, 期号: 2, 页码: 024107
Authors:  Liu, Zhixiang;  Xing, Tingwen;  Jiang, Yadong;  Lv, Baobin
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Diffraction  Diffraction gratings  Interferometers  Ray tracing  Shearing  Systematic errors  Wavefronts  
Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 17, 页码: 20511-20521
Authors:  Liu, Hongchao;  Kong, Weijie;  Liu, Kaipeng;  Zhao, Chengwei;  Du, Wenjuan;  Wang, Changtao;  Liu, Ling;  Gao, Ping;  Pu, Mingbo;  Luo, Xiangang
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HIGH-ASPECT-RATIO  PHOTONIC CRYSTALS  EUV LITHOGRAPHY  FABRICATION  DIFFRACTION  NANOLITHOGRAPHY  EXTREME  
Pushing the plasmonic imaging nanolithography to nano-manufacturing 期刊论文
Optics Communications, 2017, 卷号: 404, 页码: 62-72
Authors:  Gao, Ping;  Li, Xiong;  Zhao, Zeyu;  Ma, Xiaoliang;  Pu, Mingbo;  Wang, Changtao;  Luo, Xiangang
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Diffraction - Electromagnetic waves - Lithography - Nanolithography - Photolithography - Surface plasmon resonance  
Origins of a damage-induced green photoluminescence band in fused silica revealed by time-resolved photoluminescence spectroscopy 期刊论文
Optical Materials Express, 2017, 卷号: 7, 期号: 8, 页码: 295821
Authors:  Zhou, Jiangning;  Li, Bincheng
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Excimer lasers - Laser damage - Laser excitation - Photoluminescence - Photoluminescence spectroscopy - Silica - Silicon - Surface defects  
Orthogonal experiment and analysis of power spectral density on process parameters of pitch tool polishing 期刊论文
OPTICAL REVIEW, 2017, 卷号: 24, 期号: 1, 页码: 1-10
Authors:  Meng, Kai;  Wan, Yongjian;  Wu, Fan;  Shen, Lijun;  Wu, Hsing-Yu
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Pitch tool polishing  Orthogonal experiment  Power spectral density  Spatial frequency error  
Focusing Properties of Single-Focus Photon Sieve 期刊论文
IEEE Photonics Technology Letters, 2017, 卷号: 29, 期号: 3, 页码: 275-278
Authors:  Cheng, Yiguang;  Zhu, Jiangping;  Hu, Song;  Zhao, Lixin;  Yan, Wei;  He, Yu;  Jiang, Weibo;  Liu, Junbo
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Diffractive optics - Focusing - Photons - Sieves  
Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography 期刊论文
Advanced Optical Materials, 2015, 卷号: 3, 期号: 9, 页码: 1248-1256
Authors:  Liang, Gaofeng;  Wang, Changtao;  Zhao, Zeyu;  Wang, Yanqin;  Yao, Na;  Gao, Ping;  Luo, Yunfei;  Gao, Guohan;  Zhao, Qing;  Luo, Xiangang
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