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The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering 期刊论文
CERAMICS INTERNATIONAL, 2018, 卷号: 44, 期号: 4, 页码: 4154-4157
Authors:  Tang, Ping;  Li, Bing;  Feng, Lianghuan
Adobe PDF(1091Kb)  |  Favorite  |  View/Download:6/0  |  Submit date:2019/08/23
ZnO:Al films  Magnetron sputtering  Low substrate temperatures  
The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering 期刊论文
Ceramics International, 2017
Authors:  Tang, Ping;  Li, Bing;  Feng, Lianghuan
Adobe PDF(1091Kb)  |  Favorite  |  View/Download:29/0  |  Submit date:2018/11/20
Aluminum - Electric conductivity - Energy gap - Magnetron sputtering - Sputtering - Substrates - Ultraviolet spectroscopy - X ray diffraction - Zinc oxide