Knowledge Management System Of Institute of optics and electronics, CAS
| 硅片表面异物检测装置的实现 | |
| 戚志 | |
| Subtype | 硕士 |
| Thesis Advisor | 廖家均 |
| 1991 | |
| Degree Grantor | 中国科学院光电技术研究所 |
| Place of Conferral | 中国科学院光电技术研究所 |
| Abstract | 本文讨论了无图案抛光硅片表面微细异物检测装置的实现问题。文中对散射光收集系统，给出了各组成部份的具体要求和注意事项；对信号处理系统，讨论了实施方案，并对各组成部份给出了完善的实验电路。文中还讨论了传统的RC高通滤波对脉冲幅值的影响；还给出了一种以门限比较为基础的模拟／数字峰值保持电路。 |
| Other Abstract | the problem how to achieve the instrument for inspecting microdefects on sillicon wafers was discussed in this paper. the requirement and matters needing attention were given about the system of collecting disperse light. The implementing schemes about the signal processing system were discussed, and perfect experiment circuits were given. the influence from the traditional high pass filter to the value of pulse was discussed, too. And a peak maintainer on the basis of threshold comprater was brought out in this paper. |
| Pages | 68 |
| Language | 中文 |
| Document Type | 学位论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/99 |
| Collection | 光电技术研究所博硕士论文 |
| Recommended Citation GB/T 7714 | 戚志. 硅片表面异物检测装置的实现[D]. 中国科学院光电技术研究所. 中国科学院光电技术研究所,1991. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| N87019.pdf（2097KB） | 开放获取 | CC BY-NC-SA | Application Full Text | |||
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