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题名:
硅片表面异物检测装置的实现
作者: 戚志
学位类别: 硕士
答辩日期: 1991
授予单位: 中国科学院光电技术研究所
授予地点: 中国科学院光电技术研究所
导师: 廖家均
中文摘要: 本文讨论了无图案抛光硅片表面微细异物检测装置的实现问题。文中对散射光收集系统,给出了各组成部份的具体要求和注意事项;对信号处理系统,讨论了实施方案,并对各组成部份给出了完善的实验电路。文中还讨论了传统的RC高通滤波对脉冲幅值的影响;还给出了一种以门限比较为基础的模拟/数字峰值保持电路。
英文摘要: the problem how to achieve the instrument for inspecting microdefects on sillicon wafers was discussed in this paper. the requirement and matters needing attention were given about the system of collecting disperse light. The implementing schemes about the signal processing system were discussed, and perfect experiment circuits were given. the influence from the traditional high pass filter to the value of pulse was discussed, too. And a peak maintainer on the basis of threshold comprater was brought out in this paper.
语种: 中文
内容类型: 学位论文
URI标识: http://ir.ioe.ac.cn/handle/181551/99
Appears in Collections:光电技术研究所博硕士论文_学位论文

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Recommended Citation:
戚志. 硅片表面异物检测装置的实现[D]. 中国科学院光电技术研究所. 中国科学院光电技术研究所. 1991.
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