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Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique
Graves, Logan R.1; Choi, Heejoo1; Zhao, Wenchuan2; Oh, Chang Jin1; Su, Peng3; Su, Tianquan4; Kim, Dae Wook1,5
Source PublicationOPTICS LETTERS
Volume43Issue:9Pages:2110-2113
2018-05-01
Language英语
ISSN0146-9592
DOI10.1364/OL.43.002110
Indexed BySCI ; Ei
WOS IDWOS:000431179400043
EI Accession Number20182005182969
SubtypeJ
AbstractWe present a novel model-free iterative data-processing approach that improves surface reconstruction accuracy for deflectometry tests of unknown surfaces. This new processing method iteratively reconstructs the surface, leading to reduced error in the final reconstructed surface. The method was implemented in a deflectometry system, and a freeform surface was tested and compared to interferometric test results. The reconstructed departure from interferometric results was reduced from 15.80 mu m RMS with model-based deflectometry down to 5.20 mu m RMS with the iterative technique reported here. (C) 2018 Optical Society of America
KeywordData handling Interferometry Surface reconstruction
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Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9392
Collection先光中心
Affiliation1.College of Optical Sciences, University of Arizona, 1630 E. University Blvd., Tucson; AZ; 85721, United States;
2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
3.ASML Corporation, 77 Danbury Road, Wilton; CT; 06897, United States;
4.KLA-Tencor Corporation, 3 Technology Dr., Miltipas; CA; 95035, United States;
5.Steward Observatory, University of Arizona, 933 N. Cherry Ave., Tucson; AZ; 85719, United States
Recommended Citation
GB/T 7714
Graves, Logan R.,Choi, Heejoo,Zhao, Wenchuan,et al. Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique[J]. OPTICS LETTERS,2018,43(9):2110-2113.
APA Graves, Logan R..,Choi, Heejoo.,Zhao, Wenchuan.,Oh, Chang Jin.,Su, Peng.,...&Kim, Dae Wook.(2018).Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique.OPTICS LETTERS,43(9),2110-2113.
MLA Graves, Logan R.,et al."Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique".OPTICS LETTERS 43.9(2018):2110-2113.
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