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Department微细加工光学技术国家重点实验室(开放室)
Plasmonic direct writing lithography with a macroscopical contact probe
Huang, Yuerong1; Liu, Ling2; Wang, Changtao2; Chen, Weidong1; Liu, Yunyue1; Li, Ling1
Source PublicationAPPLIED SURFACE SCIENCE
Volume441Pages:99-104
2018-05-31
Language英语
ISSN0169-4332
DOI10.1016/j.apsusc.2018.01.304
Indexed BySCI ; Ei
WOS IDWOS:000427816400012
EI Accession Number20180704780880
SubtypeJ
AbstractIn this work, we design a plasmonic direct writing lithography system with a macroscopical contact probe to achieve nanometer scale spots. The probe with bowtie-shaped aperture array adopts spring hinge and beam deflection method (BDM) to realize near-field lithography. Lithography results show that a macroscopical plasmonic contact probe can achieve a patterning resolution of around 75 nm at 365 nm wavelength, and demonstrate that the lithography system is promising for practical applications due to beyond the diffraction limit, low cost, and simplification of system configuration. CST calculations provide a guide for the design of recording structure and the arrangement of placing polarizer. (C) 2018 Elsevier B.V. All rights reserved.
KeywordNanolithography Surface plasmons Nanostructure Contact probe
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Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9379
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation1.College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu; 610101, China;
2.State Key Laboratory of Optical Technologies on Nano-Fabricatiom and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Huang, Yuerong,Liu, Ling,Wang, Changtao,et al. Plasmonic direct writing lithography with a macroscopical contact probe[J]. APPLIED SURFACE SCIENCE,2018,441:99-104.
APA Huang, Yuerong,Liu, Ling,Wang, Changtao,Chen, Weidong,Liu, Yunyue,&Li, Ling.(2018).Plasmonic direct writing lithography with a macroscopical contact probe.APPLIED SURFACE SCIENCE,441,99-104.
MLA Huang, Yuerong,et al."Plasmonic direct writing lithography with a macroscopical contact probe".APPLIED SURFACE SCIENCE 441(2018):99-104.
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